New “Contactless” 200 mm Horizontal Wafer Shipper Now Available

Solution Helps Protect Thinner Wafers to Increase Productivity and Yields for Semiconductor Manufacturers

PUBLISHED Feb. 9, 2014

BILLERICA, MA, February 9, 2014 – Entegris, Inc. (Nasdaq:ENTG), a leader in contamination control and materials handling technologies for highly advanced manufacturing, released a new wafer shipping solution for the safe and reliable transport of 200 mm wafers used in the manufacturing of semiconductors, LEDs and MEMS. The new shippers allow silicon suppliers and device manufacturers to ship and store the latest generation of lens/bumped wafers, which are thinner and more sensitive to damage and contamination. 

“The semiconductor industry is shifting to thin and ultra-thin wafers in order to make smaller, higher performing and lower cost devices,” said Bill Shaner, vice president and general manager of Entegris’ Microenvironments Division. “This new shipping product is the latest in a long line of time-tested solutions developed by Entegris to help improve yields and increase productivity for device manufacturers as they advance their manufacturing processes.“ 

New generations of thinner 200 mm wafers are being used to produce a broad range of advanced chip designs for SOC, MEMS, LED and power semiconductors. The unique “contactless” design of the new Entegris shipper minimizes contact with the wafer surface, and replaces the need for separators inserted between the wafers during shipping, which can damage or contaminate sensitive wafers. A 25-wafer capacity designed for automation also enables improved productivity. 

To see Entegris’ 200 mm contactless shipper, and other wafer handling and advanced filtration and purification solutions, visit us at SEMICON® Korea tradeshow on February 11 to 14, 2014 in Seoul, Korea, or see our website

Entegris is a leading provider of a wide range of products for purifying, protecting and transporting critical materials used in processing and manufacturing in the semiconductor and other high-technology industries. Entegris is ISO 9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at