Entegris i2M Center for Advanced Materials Science


Facility Information

Location: 9 Crosby Drive, Bedford, MA
Total Square Footage: 80,000
Approx. number of employees when completed: 100
First operations to commence: January 2013

After a worldwide search for a premier location, Entegris will create the Entegris i2M Center for Advanced Materials Science (“i2M Center”), one of the world’s most advanced centers for the research, development and manufacturing of filtration media technologies, electrostatic clamp (E-Chucks) and proprietary, innovative low-temperature coating technologies. These products are core components for filtration and purification solutions used in the most demanding high-technology semiconductor and other electronic device manufacturing environments.

Based in Bedford, MA, the 80,000 square foot i2M Center will include approximately 6,000 square feet of rated cleanroom space. Entegris will invest approximately $45 to $50 million in building infrastructure upgrades and equipment over the next two years.

Entegris selected the Bedford site due to its proximity to the company’s existing facilities and employee base, and access to highly trained materials science and membrane engineering talent. The Entegris i2M Center will bring together three existing Massachusetts operations: 1) the Entegris Specialty Coatings business, which currently operates from a leased facility in Burlington, MA; 2) the advanced membrane manufacturing currently based at a leased facility in Bedford, MA; and 3) the company’s advanced membrane development currently based in Entegris’ headquarters facility in Billerica, MA. These moves are not expected to impact the other functions and manufacturing at the Billerica, MA, headquarters facility.

“i2M” stands for “ideas to market” and represents the focus of the new facility on innovation in the area of materials science. The i2M Center will house approximately 100 employees, the majority of whom will transfer from existing Entegris Massachusetts locations. The company will also add 10 new engineering and other skilled positions specializing in membrane science and electrostatic clamp technologies. 

Industry Need
As smart phones, tablet computers, and other electronics become smaller, more powerful, and consume less energy, the technologies that are being employed to manufacture those devices are pushing the boundaries of physics. Entegris is enabling those technologies by solving the most difficult purification, process control and material protection challenges in advanced semiconductor and electronics manufacturing. 

Currently, semiconductor devices are manufactured using the most advanced processes and materials known to man and require levels of purity that measures contamination in parts-per-quadrillion (ppq). Achieving these precise levels of purity requires filtration solutions that can prevent nanolevel particles, bubbles and ions from reaching the semiconductor substrate during manufacturing. Polymeric membranes are the core material which is used to capture these contaminants. These solutions help advanced high-tech manufacturers improve productivity, performance and technology to develop next-generation semiconductors and electronics.

Related Facts

  • The level of contamination control required for advanced semiconductor technologies is far more stringent than in any other industry. Other industries deal with particle sizes from the 20-200 nanometer range (bacteria is 200 nanometers and the smallest virus is 20 nanometers). Entegris’ current line of filtration products helps control contamination from particles as small as 3 nanometers in size. This requires highly sophisticated and extremely advanced membrane filter manufacturing.
  • For the next generation of semiconductor devices, the manufacturing environment must reach levels of purity that are measured in ppq. This means that the allowable level of contamination is one ppq, which is equivalent to one drop of water in an area the size of the entire Empire State Building.

About Entegris
For more than 40 years, Entegris has provided a wide range of products for purifying, protecting and transporting critical materials used in processing and manufacturing for the semiconductor, microelectronics, energy, life sciences and other high-tech industries. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors and automobiles. With research and development, customer service, analytical labs and manufacturing in Asia-Pacific, North America and Europe, Entegris supports customers around the globe as they take technology to the next level.

Locations and Certifications

  • Worldwide Headquarters: Billerica, MA
  • Manufacturing, customer service or research facilities in 33 countries: United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan
  • ISO 9001 certified


  • Massachusetts: 350
  • Worldwide: 2,700

Executive Management

  • Bertrand Loy, President and CEO
  • Gregory B. Graves, Executive VP and CFO
  • Financials
  • Sales: $749 million in fiscal 2011
  • Traded on NASDAQ; stock symbol: ENTG


  • 1966: Entegris founded in Minnesota
  • 2000: Entegris’ initial public offering
  • 2005: Merged with Mykrolis, a spinout of Millipore  Corporation
  • 2009: Moved corporate headquarters to Billerica, MA
  • 2011: Achieved record sales and earnings

Media Contacts
Steve Cantor, VP, Corporate Communications
978-436-6750; irelations@entegris.com