Efficient, cost-effective solutions designed to enable precision polishing steps to exacting specifications.
Substrate polishing takes place in several steps using progressively finer abrasives. You can rely on our portfolio of CMP pad conditioners, liquid filters, and industry-leading fluid handling solutions to meet your exacting roughness specifications, repeatedly and efficiently.
The Planargem family of Pad Conditioners have been specifically designed to address both performance and lifetime needs of our customers. Real CVD diamond features provide lifetimes far in excess of standard pad conditioning technology. The Planargem family consists of a number of different products, designed to be compatible with the ever growing range of CMP Pad types.