Bulk Chemical Delivery
Reliable solutions to your bulk chemical delivery challenges that help improve yields, lower costs, and improve tool utilization
Managing process integrity starts with the chemicals that come into direct contact with every wafer and IC produced. Entegris provides a comprehensive portfolio of solutions to help you safely handle and deliver these high purity, microelectronic-grade chemicals. Look to our reliable, proven, comprehensive and innovative solutions to maintain purity, improve yields and lower costs in your bulk chemical delivery applications.
Liquid filter housings provide a variety of performance and operator safety benefits. Polymer housings, or those with a PTFE lining, are typically utilized in higher cleanliness applications and those that are more sensitive to metals leaching into the process materials. Stainless steel housings are typically used in higher pressure, elevated temperature applications.