Solutions that ensure reliable contamination control, clean transport and advanced planarization performance.
Look to Entegris to reduce operating costs, maximize operational efficiency and improve the value of your CMP operations. Entegris offers a variety of liquid and air filters, pad conditioners, cleaning solutions, fluid management and sensing and control components that eliminate particles and maintain purity in slurry and post CMP cleaning solutions.
Cleanroom filtration utilizes unique chemistry to remove critical contaminants at a lower pressure drop. VaporSorb™ cleanroom chemical filters deliver greater than 95% removal efficiency. Implementation is easy in front/rear access frame banks, side access housing units or ceiling fan units.
Our family of FluoroPure® HDPE drums allows companies to better meet their chemical purity requirements while delivering electronic-grade specialty chemicals. Having manufacturing plants in the United States and Taiwan enables us to design and manufacture products that meet Asia/Pacific size specs as well as the rest of the world size specifications. Our product portfolio has material options to meet all purity requirements, and our drums offer various transportation approvals and have higher purity, lower trace metals and fewer particles compared to industry standard HDPE drums.