Dry Etch

Reducing contaminates and selecting the best components can help maintain higher etch rates to enhance and protect your process

Reaching your process goals means controlling both what you want and don't want to happen during run time. Our advanced components and coatings, process tool air filters and gas filtration products can reduce undesireable effects, enhance performance and help you maintain higher etch rates.

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Considerations for Improving 3D NAND Performances, Reliability, and Yield