The right products and systems can generate the safest, most effective results for your implant process
Your implant center represents a large investment and adding the right pieces can realize a safe and efficient process that makes the most of it. From materials to materials handling and delivery to filtration and purification to the most effective components, go with the safest choice in ion implant processing.
Cleanroom filtration utilizes unique chemistry to remove critical contaminants at a lower pressure drop. VaporSorb™ cleanroom chemical filters deliver greater than 95% removal efficiency. Implementation is easy in front/rear access frame banks, side access housing units or ceiling fan units.
Available with stainless steel or nickel filter elements, Wafergard® gas filters provide ultimate process protection, superior corrosion-resistance, and excellent compatibility with inert, hydride, and reactive gases. The surface-mount design consumes less space on gas panels and reduces parts inventories and variations.
We offer a wide range of graphite materials as well as post processing and machining capabilities to meet the demanding requirements of semiconductor processes. You can choose the right graphite for your application by grain size (one, five and ten micron) and all grades are sold in bulk form or as a custom machined components for specific applications.