Reducing contamination to keep your inspection systems and testing environment clean
We are the experts in controlling contamination that could affect key process steps and be introduced to wafer surfaces. It makes sense then, that the environment you use to measure and identify wafer and component defects should have its own levels of protection. Look to us for that protection around, on and in your tools.
Cleanroom filtration utilizes unique chemistry to remove critical contaminants at a lower pressure drop. VaporSorb™ cleanroom chemical filters deliver greater than 95% removal efficiency. Implementation is easy in front/rear access frame banks, side access housing units or ceiling fan units.
We specialize in silicon and carbon-based coatings using PECVD processes. Highly compatible to fit your business, deposit coatings can be used on a variety of vacuum compatible substrates including metals, alloys, ceramics, semiconductors and polymers. We can coat chambers that can accommodate different shapes and sized items, up to 31" in diameter.