Our solutions ensure reliable contamination control, clean transport and safe transport of wafers.
Look to us to reduce operating costs, maximize operational efficiency and improve the value of your chemical product. We offer a variety of liquid, air and liquid packaging, photochemical dispense pumps, gas filters and purifiers, reticle handling, and wafer process and shipper products in photolithography solutions.
Controlling metal ions and other contaminants in critical process streams is a vital way to improve operating efficiency and enable technology advances. Available with PTFE and PS, PES membrane and ion exchange media, each purifier is designed to reduce defects caused by metal ions and other contaminants.
Learn how our two-stage dispense technology with a built-in Impact® 8G filter manifold enables independent filtration and dispense. Available for low-, medium- and high-viscosity fluids. Communication systems enable you to network your pumps for efficient process monitoring.
We specialize in silicon and carbon-based coatings using PECVD processes. Highly compatible to fit your business, deposit coatings can be used on a variety of vacuum compatible substrates including metals, alloys, ceramics, semiconductors and polymers. We can coat chambers that can accommodate different shapes and sized items, up to 31" in diameter.