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Fluid Management

We provide entire system solutions for building a complete, leak-free, reliable fluid handling network from bulk chemical distribution to the point of use.

We have the broadest range of fluid management solutions that maximize fab productivity, improve fab yields and reduce cost of ownership throughout bulk chemical delivery, CMP, WEC and lithography processes.

Featured Video

Entegris Defends Against Dangerous ESD

Summary
- In this expert video, Mark Caulfield, senior technology manager, explains the dangers of static charge accumulation and harmful electrostatic discharge in PFA fluid handling systems, and presents innovative solutions being developed to overcome the many challenges presented by electrostatic hazards.

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Fluid Handling

The most comprehensive portfolio for building a complete, leak-free fluid handling network.

Process Monitoring

Offering particle characterization and precise process control and measurement of critical fluids in harsh environments and ultrapure applications.

Liquid Packaging

Safely transport, store and dispense ultrapure materials in bulk or to the point of use.

Valves

High-purity, PFA corrosion-resistant valves provide maximum fluid control of corrosive chemicals, DI water, solvents and slurries.