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Fluid Management

We provide entire system solutions for building a complete, leak-free, reliable fluid handling network from bulk chemical distribution to the point of use.

We have the broadest range of fluid management solutions that maximize fab productivity, improve fab yields and reduce cost of ownership throughout bulk chemical delivery, CMP, WEC and lithography processes.

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Featured Video

ENTEGRIS DEFENDS AGAINST DANGEROUS ESD In this expert video, Mark Caulfield, senior technology manager, explains the dangers of static charge accumulation and harmful electrostatic discharge in PFA fluid handling systems, and presents innovative solutions being developed to overcome the many challenges presented by electrostatic hazards.

Fittings

Clean, robust, leak-free connection technology for high-temperature and high-pressure applications.

Valves

High-purity, PFA corrosion-resistant valves provide maximum fluid control of corrosive chemicals, DI water, solvents and slurries.

Liquid Packaging

Safely transport, store and dispense ultrapure materials in bulk or to the point of use.

Fluid Handling Accessories

Reliable, high-purity accessories that complement the most complex fluid network.

Sensing and Control

Precise control and measurement of process fluids in harsh environments and ultrapure applications.

Photochemical Dispense Pumps

Learn how our two-stage dispense technology with a built-in Impact® 8G filter manifold enables independent filtration and dispense. Available for low-, medium- and high-viscosity fluids. Communication systems enable you to network your pumps for efficient process monitoring.

Tubing and Pipe

Entegris offers PFA PureBond® weldable pipe and a variety of FluoroLine® tube materials, including PFA, for use in highly corrosive applications, and industrial grades for less demanding applications.

Custom Products

Entegris can fabricate all types of specialty plastic products within a fluid handling network, whether it involves plastic machining, welding or general fabrication. Our unique solutions help you increase yields and reduce costs.

Fittings Selection Tool

Valves Selection Tool