• our science our science Our Science

    • By Industry

      • Life Sciences

      • Microelectronics

        • Semiconductor

        • Data Storage

        • Flat Panel Display

        • LED

        • Solar

      • Industrial

        • Aerospace

        • Chemical Manufacturing

        • Chromatography and Analytical

        • Coatings, Inks, and Adhesives

        • EDM

        • General Industrial

        • Glass Forming

        • Polymer Manufacturing

        • Water Treatment

        • Commercial Air Quality

    • By Role

      • Logic Manufacturers

      • Memory Manufacturers

      • Semiconductor Equipment Manufacturers

      • Chemical Suppliers

      • Bioprocessors

    • By Solution Area

      • Contamination Control

      • Fluid Management

      • Life Sciences

      • Specialty Materials

      • Substrate Handling

    • By Service

      • Analytical Services

      • Field Support Services

      • FOUP Services

      • Life Sciences Contract Development Services

      • Refurbishment Services

      • Regeneration Services

      • Technology Centers

        • China Technology Center

        • Korea Technology Center

        • Life Sciences Technology Center

  • product catalog product catalog Product Catalog

    • Chemistries

      • Chemical Delivery Systems

        • Solid Chemical Delivery Systems

        • Liquid Chemical Delivery Systems

      • Specialty Chemicals

        • Catalysts

        • Coating, Ink, and Adhesive Ingredients

          • Resin Monomers and Components

          • Surface Modifiers

        • Post-CMP Cleaning Solutions

          • Semiconductor Cleaning Solutions

            • PlanarClean® Cleaning Solutions

            • ESC Cleaning Solutions

          • Wide Band Gap Semiconductor Cleaning Solutions

          • HDD Media Substrate Cleaning Solutions

        • Post Etch Cleaning Solutions

          • TitanKlean® Cleaning Solutions

          • ST Cleaning Solutions

          • NOE Etchant Cleaning Solutions

        • Precursors

          • Upstream ALD/CVD Precursors

          • Advanced Deposition Materials (ADM) ALD/CVD Precursors

        • Slurries

        • Silanes

        • Organophosphorus Compounds

        • Specialty Acrylates and Methacrylates

        • Siloxanes

        • Specialty Additives

        • Ligands

        • Wafer Reclaim

    • Device Trays

      • Tray Wizard

      • H20 Series Accessories

      • H44 Series Accessories

    • Fluid Management Systems

      • Fittings Selection Tool

      • Liquid Packaging

        • Chemical and Bioprocessing Containers

          • FluoroPure® HDPE Blowmolded Drums

            • FluoroPure® Advantage Trilayer HDPE Blowmolded Drums

            • FluoroPure® Trilayer HDPE Blowmolded Drums

          • FluoroPure® Composite Drums

          • FluoroPure® Custom Products

        • Single-Use Assemblies

          • 2D and 3D Bags

          • Mixing Systems

          • Motion Bioreactor Bags

          • Microcarrier and Cell Separation Systems

          • Secondary Containment

        • NOWPak® Liner Based Systems

        • Sentry® Quick Connect Systems

        • FluoroPure® Intermediate Bulk Containers

        • FluoroPure® Port Options, Tools and Accessories

        • Tube Sets and Manifolds

        • Custom Dip Tubes

        • FluoroPure® Pressure Vessels

        • Process Tanks

      • Valves Selection Tool

      • Fluid Handling

        • Fittings

          • PrimeLock® Tube Fittings

          • PrimeLock® ESD Tube Fittings

          • PrimeLock® Accessories

          • Flaretek® Tube Fittings

          • Flaretek® Accessories

          • Cynergy® Fittings

          • Cynergy® Accessories

          • EP PFA Flare Fittings

          • EP PFA Flare Fitting Accessories

          • PureBond® Welded Tube Fittings

          • Quikgrip® Tube Fittings

          • Quikgrip® PFA Nuts

          • Integral Ferrule Tube Fittings

          • Integral Ferrule Accessories

          • Barb PFA Tube Fittings

          • Dual Containment Fittings

          • PureBond® Welded Pipe Fittings

          • PureBond® Accessories

          • NPT Pipe Fittings

          • NPT Accessories

        • Valves

          • CR and CH Series Valves

            • CR4 Series Valves

            • CR8 Series Valves

            • CH8 Series High-Temperature Valves

            • CRE4 Series Valves

            • CRE8 Series Valves

          • Integra® Valves

          • EP PFA Valves

          • Manifolds and Assemblies

          • Plug Valves

          • Needle/Metering Valves

          • Stopcock Valves

          • Check Valves

          • Valve Accessories

          • Integra® Plus WS ESD Valves

        • Fluid Handling Accessories

          • Spray Products

          • Aspirators

          • Fasteners

        • Valves Selection Tool

        • Fittings Selection Tool

        • Tubing and Pipe

        • Custom Products

      • Process Monitoring

        • Process Control

          • Integrated Flow Controllers

          • NT™ Proportional Control Valves

          • Photochemical Dispense Pumps

        • Process Measurement

          • Concentration Monitors

          • Electronic Flowmeters

          • NT™ Pressure Transducers

        • Particle Characterization

    • Gas Filtration and Purification

      • Gas Diffusers

        • Chambergard™ Gas Diffusers

      • Gas Filters

        • Other Gas Filters

        • In-Line PTFE Gas Filters

        • In-Line Stainless Steel Gas Filters

        • In-Line Nickel Gas Filters

        • Surface Mount Gas Filters

      • AMC Filters

        • Stepper and Scanner Filters

        • Process Tool Air Filters

        • Facility Filtration

        • Filter Housings and Stand-alone Filter Cabinets

      • Gas Purifiers

    • Hard Disk Component Handling

      • Storage Boxes and Individual Disk Packages

      • Read-Write Trays and Carriers

      • Disk Shippers

      • Disk Process Carriers

    • Liquid Filtration and Purification

      • Liquid Filters

      • Liquid Purifiers

      • Liquid Filter Housings

    • Mask and Reticle Handling

      • Reticle Pods and Purge Cabinets

      • Mask Carriers and Shipping Boxes

      • Mask Packages

    • Other Substrate Handling

      • Miscellaneous Device Processing

      • Solar Cell Solutions

    • Specialty Gases

      • Specialty Gas Mixtures

      • Gas Delivery Cylinder Systems

      • Gas Delivery Cabinet Systems

      • Gases

    • Specialty Materials

      • Premium Graphite

        • Industrial Graphite Grades

        • Semiconductor Graphite Grades

        • Life Sciences Graphite Grades

        • Premium Graphite Components

        • Glass Forming Graphite Grades

        • GLASSMATE® Components

        • Graphite Processing Options

        • Aerospace Components

      • Coatings

        • Chucks

        • Plasma Enhanced Chemical Vapor Deposition (PECVD) Coatings

        • Caerus™ Coating Technology

        • Pegasus™ Coating Technology

      • Premium Silicon Carbide

        • SUPERSiC<sup>®</sup> Silicon Carbide Components

        • SUPERSiC<sup>®</sup> Silicon Carbide

      • Advanced Cleaning Materials

    • Wafer Handling

      • Wafer Processing

        • CMP Cleaning Brushes

        • CMP Pads

        • 300 mm Front Opening Unified Pods (FOUPs)

        • 200 mm Wafer Processing

        • 200 mm Accessories

        • 150 mm Wafer Processing

        • 150 mm and Smaller Wafer Carrier Accessories

        • 125 mm Wafer Processing

        • 100 mm Wafer Processing

        • 76.2 mm 3" Wafer Processing

        • 2.5" and Smaller Wafer Processing

        • Labware

        • Chucks

      • Wafer Shipping

        • 300 mm Wafer Shippers

        • 200 mm Wafer Shippers

        • 150 mm Wafer Shippers

        • 125 mm Wafer Shippers

        • 100 mm Wafer Shippers

        • 76.2 mm (3") Wafer Shippers

        • 2.5" and Smaller Wafer Shippers

      • Finished Wafer Shipping

        • SmartStack® Contactless Horizontal Wafer Shipper

        • SmartStack® Horizontal Wafer Shippers

        • Film Frame Rings and Shippers

  • resources resources Resources

    • Reference Materials

    • Technical Information

      • Calculators and Tools

      • Chemical Compatibility

      • Chemlock® Filter Housing Technical Information

      • Component Technical Information

      • Entegris Test Standards and Protocols

      • FAQ

      • Formulas

      • Glossary

      • Material Properties and Safety

      • Particle Characterization Applications

    • Industry Insights

      • 3D NAND Solutions

      • Accelerating Speed-to-Yield with High-Purity Materials Solutions

      • Achieving Hydrogen Purity Standards for Fuel Cells

      • Advanced Coatings

      • Advanced Deposition Materials Innovation

      • Automotive Reliability

      • Cars and Chips: The Acceleration of Electronic Systems

      • Chasing the Perfect Pattern

      • Chemical Mechanical Planarization (CMP)

      • Clean Chemical Delivery

      • Clean Gas Delivery

      • CMP Process Monitoring

      • Cold Chain Bioprocessing

      • Dual Containment Tubing

      • Electrostatic Discharge (ESD) Prevention

      • Enabling Advanced Lithography

      • End-to-End Gas Filtration Solutions

      • Food and Beverage Contamination Control

      • Front-end to Back-end Solutions

      • Glass in Front; Glass in Back

      • High-Density Cell Banking

      • High Purity Chemical Manufacturing

      • Holistic Approach to Enabling Device Performance, Yield, and Reliability

      • Low-Temperature Bioprocessing

      • More Than Just a Chip Tray

      • Operational Excellence

      • Pandemic Response

      • Particle Characterization

      • Pervasive Defectivity in Semiconductor Manufacturing

      • Protecting Your Data Center Environment from Gas-Phase Contamination

      • Silicon Carbide Substrate Solutions

      • Solid Precursors and Delivery Systems

      • Solving Advanced Technology Challenges with Innovative Materials

      • Specialty Gases and Delivery Systems for Ion Implantation

      • Storage Class Memory

      • Targeted Contaminant Removal

      • The Rare Air of the Semiconductor Fab

      • The Silicon Precursor Toolbox for Low-Temperature Deposition

    • Ensights (Blog)

    • Scientific Report

  • about us about us About Us

    • Corporate Overview

    • Corporate Social Responsibility

    • Careers

    • Events

    • Investor Relations

    • Legal/Trademark Notices

    • Locations

    • News Releases

    • Entegris Blog

    • Manufacturing

Our Sites Our Sites Our Sites
more more More

Liquid Filtration and Purification

Contamination control of process liquids

Solutions to particle, gel, agglomerate, metal ion, and organic contamination in photochemicals, slurries, solvents, acids, bases, water, and other process materials. Available in a variety of membrane and media technologies to optimize process efficiency and enable technology advancements.

featured white paper

download-pdf
Targeted Contamination Removal Assures Purity in Advanced Materials: A Defect Reduction Collaboration Model
Download now

featured white paper

download-pdf
Targeted Contamination Removal Assures Purity in Advanced Materials: A Defect Reduction Collaboration Model
Download now

featured white paper

download-pdf
Targeted Contamination Removal Assures Purity in Advanced Materials: A Defect Reduction Collaboration Model
Download now
video

Hybrid Metrology Approach to Holistic Filtration Solutions: Hydrogen Peroxide with PTFE Membrane

Watch Kusum Maharjan, Entegris applications engineer, highlight the use of hybrid metrology to characterize the contaminants found in a recent study of hydrogen peroxide. Runtime: 02:40

Liquid Filters

We offer a variety of membrane and media to match the chemical compatibility and process conditions of each manufacturing environment.
Liquid Purifiers

Controlling metal ions and other contaminants in critical process streams is a vital way to improve operating efficiency and enable technology advances. Available with PTFE, PS and UPE membrane and ion exchange media, each purifier is designed to reduce defects caused by metal ions and other contaminants.
Liquid Filter Housings

Liquid filter housings provide a variety of performance and operator safety benefits. Polymer housings, or those with a PTFE lining, are typically utilized in higher cleanliness applications and those that are more sensitive to metals leaching into the process materials. Stainless steel housings are typically used in higher pressure, elevated temperature applications.