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Mask and Reticle Handling

A broad array of products for mask and reticle handling

Offering products engineered to provide secure mask protection and precise automation interface, increasing yields and minimizing unscheduled downtime.

Featured White Paper

download-pdf
Enabling Advanced Lithography: The Challenges of Storing and Transporting EUV Reticles
Download Now

Featured White Paper

download-pdf
Enabling Advanced Lithography: The Challenges of Storing and Transporting EUV Reticles
Download Now

Featured White Paper

download-pdf
Enabling Advanced Lithography: The Challenges of Storing and Transporting EUV Reticles
Download Now
Reticle Pods and Purge Cabinets

These cost-effective, reticle pods and purge cabinets protect, store and transport valuable lithography reticles, and provide an extremely high degree of contamination protection.
Mask Carriers and Shipping Boxes

Entegris offers an array of Mask Carriers and Shipping Boxes designed to protect, store and transport valuable masks. 
Mask Packages

We offer an array of Mask Packages that offer users the advantages of a cost-effective design combined with an extremely high degree of contamination protection.