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Mask and Reticle Handling

A broad array of products for mask and reticle handling

Offering products engineered to provide secure mask protection and precise automation interface, increasing yields and minimizing unscheduled downtime.

Featured White Paper

Enabling Advanced Lithography: The Challenges of Storing and Transporting EUV Reticles

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Extreme Ultraviolet Light (EUV) Reticle Pods

Dual pod design offers an inner and outer pod to maintain a contamination-free environment. The EUV pod interfaces with production equipment such as metrology tools, scanners and stockers and is compliant with SEMI® Standard E152.

Reticle SMIF Pods

Entegris offers an array of Reticle SMIF Pods designed to protect, store and transport valuable lithography reticles. Our reticle pods offer advantages of a cost-effective design combined with an extremely high degree of contamination protection.

Mask Carriers and Shipping Boxes

Entegris offers an array of Mask Carriers and Shipping Boxes designed to protect, store and transport valuable masks.

Mask Packages

We offer an array of Mask Packages that offer users the advantages of a cost-effective design combined with an extremely high degree of contamination protection.