Chemical Compatibility – Photolithography POU Filters and Flushing Shells
Entegris point-of-use (POU) filters, flushing shells, and components are constructed from a variety of materials that have differing levels of chemical compatibility.
A comprehensive chemical compatibility list follows. Please contact your local Entegris applications engineer for more information and for chemicals not listed.
Notes:
Entegris recommends that customers change filters at least annually to ensure optimal filtration performance. Routine annual changeout will also reduce the potential of chemical leakage that can result from excessive usage. Our warranty period is 1 year (from Entegris ship date).
The flushing shell is designed for short-term use (less than 1 month) in flushing chemical lines and systems; the warranty will be voided when the product is used in lieu of a filtration device or is subjected to long-term exposure to solvents in a pressurized environment.
Solvent Key
Solvent name (Abbreviation) | Solvent name (Full) |
4. Anisole | Methyl phenyl ether, Methoxybenzene |
6. Butyl ether | Dibutyl ether |
9. 2.38% TMAH developer | Tetramethylammonium hydroxide |
12. EEP | Ethyl 3-ethoxypropionate |
18. 2-Heptanone | Methyl amyl ketone |
19. HMDS | Hexamethyldisilazane |
20. IPA | Isopropyl alcohol, 2-Propanol |
21. Isobutyl ketone | 2,6-Dimethyl-4-heptanone, Diisopropylacetone, Diisobutyl ketone (DIBK) |
24. Methyl ethyl ketone | 2-Butanone |
25. MIBC | Methyl isobutyl carbinol |
26. MIBK | Methyl isobutyl ketone, 4-Methyl-2-pentanone |
27. NMP | N-methyl pyrrolidinone |
28. PGEE | Propylene glycol monoethyl ether, 1-Ethoxy-2-propanol |
29. PGME | Propylene glycol monomethyl ether, 1-Methoxy-2-propanol |
30. PGMEA | Propylene glycol monomethyl ether acetate, 1-Methoxy-2-propyl acetate |