• our science our science Our Science
    • By Industry

      • Life Sciences

      • Microelectronics

        • Semiconductor

        • Data Storage

        • Flat Panel Display

        • LED

        • Solar

      • Industrial

        • Aerospace

        • General Industrial

        • Polymer Manufacturing

        • Water Treatment

        • Chemical Manufacturing

        • Chromatography and Analytical

        • Coatings, Inks, and Adhesives

        • Glass Forming

    • By Role

      • Logic Manufacturers

      • Memory Manufacturers

      • Semiconductor Equipment Manufacturers

      • Chemical Suppliers

    • By Solution Area

      • Contamination Control

      • Fluid Management

      • Life Sciences

      • Specialty Materials

      • Substrate Handling

    • By Service

      • Analytical Services

      • Cleaning Services

      • Field Support Services

      • FOUP Services

      • Refurbishment Services

      • Regeneration Services

      • Technology Centers

        • China Technology Center

        • Life Sciences Technology Center

  • product catalog product catalog Product Catalog
    • Bare Die/CSP Trays

      • Tray Wizard

      • H20 Series Accessories

      • H44 Series Accessories

    • Chemistries

      • Chemical Delivery Systems

        • Solid Chemical Delivery Systems

        • Liquid Chemical Delivery Systems

      • Specialty Chemicals

        • Catalysts

        • Coating, Ink, and Adhesive Ingredients

          • Resin Monomers and Components

          • Surface Modifiers

        • Post-CMP Cleaning Solutions

          • Semiconductor Cleaning Solutions

            • PlanarClean® Cleaning Solutions

            • ESC Cleaning Solutions

          • Wide Band Gap Semiconductor Cleaning Solutions

          • HDD Media Substrate Cleaning Solutions

        • Post Etch Cleaning Solutions

          • TitanKlean® Cleaning Solutions

          • ST Cleaning Solutions

          • NOE Etchant Cleaning Solutions

        • Precursors

          • Upstream ALD/CVD Precursors

          • Advanced Deposition Materials (ADM) ALD/CVD Precursors

        • Slurries

        • Ligands

        • Silanes

        • Organophosphorus Compounds

        • Specialty Acrylates and Methacrylates

        • Siloxanes

        • Specialty Additives

        • Wafer Reclaim

    • Fluid Management Systems

      • Liquid Packaging

        • Chemical and Bioprocessing Containers

          • FluoroPure® HDPE Blowmolded Drums

            • FluoroPure® Advantage Trilayer HDPE Blowmolded Drums

            • FluoroPure® Trilayer HDPE Blowmolded Drums

          • FluoroPure® Composite Drums

          • Rigid Bioprocessing Support Containers

          • FluoroPure® Custom Products

        • Single-Use Assemblies

          • Motion Bioreactor Bags

          • Mixing Systems

          • 2D and 3D Bags

          • Microcarrier and Cell Separation Systems

        • NOWPak® Liner Based Systems

        • Tube Sets and Manifolds

        • Sentry® Quick Connect Systems

        • FluoroPure® Intermediate Bulk Containers

        • FluoroPure® Port Options, Tools and Accessories

        • Custom Dip Tubes, Tanks, and Containers

        • FluoroPure® Pressure Vessels

        • Process Tanks

      • Fluid Handling

        • Fittings

          • PrimeLock® Tube Fittings

          • PrimeLock® ESD Tube Fittings

          • PrimeLock® Accessories

          • Flaretek® Tube Fittings

          • Flaretek® Accessories

          • Cynergy® Fittings

          • Cynergy® Accessories

          • EP PFA Flare Fittings

          • EP PFA Flare Fitting Accessories

          • PureBond® Welded Tube Fittings

          • Quikgrip® Tube Fittings

          • Quikgrip® PFA Nuts

          • Integral Ferrule Tube Fittings

          • Integral Ferrule Accessories

          • Barb PFA Tube Fittings

          • Dual Containment Fittings

          • PureBond® Welded Pipe Fittings

          • PureBond® Accessories

          • NPT Pipe Fittings

          • NPT Accessories

        • Valves

          • CR and CH Series Valves

            • CR4 Series Valves

            • CR8 Series Valves

            • CH8 Series High-Temperature Valves

          • Integra® Valves

          • Cynergy® Valves

          • EP PFA Valves

          • Manifolds and Assemblies

          • SG Series Valves

          • Solenoid Valves

          • Stack Valves

          • Plug Valves

          • Needle/Metering Valves

          • Stopcock Valves

          • Check Valves

          • Valve Accessories

        • Fluid Handling Accessories

          • Gauge Protectors

          • Spray Products

          • Aspirators

          • Fasteners

        • Valves Selection Tool

        • Fittings Selection Tool

        • Tubing and Pipe

        • Custom Products

      • Process Monitoring

        • Process Control

          • Integrated Flow Controllers

          • NT™ Proportional Control Valves

          • Photochemical Dispense Pumps

        • Process Measurement

          • Concentration Monitors

          • Electronic Flowmeters

          • NT™ Pressure Transducers

        • Particle Characterization

    • Gas Filtration and Purification

      • Gas Diffusers

        • Chambergard™ Gas Diffusers

      • Gas Filters

        • In-line Alloy-22 Gas Filters

        • Other Gas Filters

        • In-Line PTFE Gas Filters

        • In-Line Stainless Steel Gas Filters

        • In-Line Nickel Gas Filters

        • Surface Mount Gas Filters

      • AMC Filters

        • Stepper and Scanner Filters

        • Process Tool Air Filters

        • Facility Filtration

        • Filter Housings and Stand-alone Filter Cabinets

      • Air and Gas Filter Membranes

      • Gas Purifiers

    • Hard Disk Component Handling

      • Storage Boxes and Individual Disk Packages

      • Read-Write Trays and Carriers

      • Disk Shippers

      • Disk Process Carriers

    • Liquid Filtration and Purification

      • Liquid Filters

      • Liquid Purifiers

      • Liquid Filter Housings

    • Mask and Reticle Handling

      • Reticle Pods and Purge Cabinets

      • Mask Carriers and Shipping Boxes

      • Mask Packages

    • Other Substrate Handling

      • Miscellaneous Device Processing

      • Solar Cell Solutions

    • Specialty Materials

      • Premium Graphite

        • Industrial Graphite Grades

        • Semiconductor Graphite Grades

        • Life Sciences Graphite Grades

        • Premium Graphite Components

        • Glass Forming Graphite Grades

        • GLASSMATE® Components

        • Graphite Processing Options

      • Coatings

        • Chucks

        • Plasma Enhanced Chemical Vapor Deposition (PECVD) Coatings

        • Caerus™ Coating Technology

        • Pegasus™ Coating Technology

      • Premium Silicon Carbide

        • SUPERSiC<sup>®</sup> Silicon Carbide Components

        • SUPERSiC<sup>®</sup> Silicon Carbide

    • Specialty Gases

      • Specialty Gas Mixtures

      • Gas Delivery Cylinder Systems

      • Gas Delivery Cabinet Systems

      • Gases

    • Wafer Handling

      • Wafer Processing

        • CMP Pad Conditioners and Cleaning Brushes

        • 300 mm Front Opening Unified Pods (FOUPs)

        • 200 mm Wafer Processing

        • 200 mm Accessories

        • 150 mm Wafer Processing

        • 150 mm and Smaller Wafer Carrier Accessories

        • 125 mm Wafer Processing

        • 100 mm Wafer Processing

        • 76.2 mm 3" Wafer Processing

        • 2.5" and Smaller Wafer Processing

        • Labware

        • Chucks

      • Wafer Shipping

        • 300 mm Wafer Shippers

        • 200 mm Wafer Shippers

        • 150 mm Wafer Shippers

        • 125 mm Wafer Shippers

        • 100 mm Wafer Shippers

        • 76.2 mm (3") Wafer Shippers

        • 2.5" and Smaller Wafer Shippers

      • Finished Wafer Shipping

        • SmartStack® Contactless Horizontal Wafer Shipper

        • SmartStack® Horizontal Wafer Shippers

        • Film Frame Rings and Shippers

  • resources resources Resources
    • Reference Materials

    • Technical Information

      • Calculators and Tools

      • Chemical Compatibility

      • Chemlock® Filter Housing Technical Information

      • Component Technical Information

      • Entegris Test Standards and Protocols

      • FAQ

      • Formulas

      • Glossary

      • Material Properties and Safety

      • Particle Characterization Applications

    • Industry Insights

      • 3D NAND Solutions

      • Achieving SAE J2719 Quality Hydrogen for Fuel Cells

      • Advanced Coatings

      • Advanced Deposition Materials Innovation

      • Automotive Reliability

      • Cars and Chips: The Acceleration of Electronic Systems

      • Chasing the Perfect Pattern

      • Chemical Mechanical Planarization (CMP)

      • Clean Chemical Delivery

      • Clean Gas Delivery

      • CMP Process Monitoring

      • Dual Containment Tubing

      • Electrostatic Discharge (ESD) Prevention

      • Enabling Advanced Lithography

      • End-to-End Gas Filtration Solutions

      • Front-end to Back-end Solutions

      • Glass in Front; Glass in Back

      • High Purity Chemical Manufacturing

      • Holistic Approach to Enabling Device Performance, Yield, and Reliability

      • Internet of Things

      • More Than Just a Chip Tray

      • Operational Excellence

      • Particle Characterization

      • Pervasive Defectivity in Semiconductor Manufacturing

      • The Rare Air of the Semiconductor Fab

      • Silicon Carbide Slurries

      • The Silicon Precursor Toolbox for Low-Temperature Deposition

      • Solid Precursors and Delivery Systems

      • Solutions in Advanced Logic

      • Solving Advanced Technology Challenges with Innovative Materials

      • Storage Class Memory

    • Ensights (Blog)

  • about us about us About Us
    • Corporate Overview

    • Corporate Social Responsibility

    • Careers

    • Events

    • Investor Relations

    • Legal/Trademark Notices

    • Locations

    • News

    • Entegris Blog

Entegris Test Standards and Protocols

Fluid Handling Products

Entegris invests a significant amount of time and money in the continual testing of the products we produce and sell. We utilize the following standards for the qualification and ongoing testing of our fluid handling products. In conjunction with these standards, we have developed numerous other testing programs to accommodate the unique designs and materials of our products. This is done to ensure our products will perform in a safe and reliable manner.

ASME Standards
ASME, Section VIII, Division I Pressure integrity test for pressure vessel, inner liner of fluoropolymer material, metal outer shell.
ASTM Standards
D1598 Standard test method for time-to-failure of plastic pipe under constant internal pressure.
D1599* Standard test method for short-time hydraulic failure pressure of plastic pipe, tubing and fittings.
D2122* Standard test method for determining dimensions of thermoplastic pipe and fittings.
D2143* Standard test method for cyclic pressure strength of reinforced, thermosetting plastic pipe
D2837 Obtaining hydrostatic design basis for thermoplastic pipe materials.
D3332* Standard test methods for mechanical-shock fragility of products using shock machines.
D3580* Standard test methods for vibration (vertical linear motion).
D4332* Standard practice for conditioning containers, packages or packaging components for testing.
E432* Standard guide for selection of leak testing method
E479* Standard guide for preparation of a leak testing specification
E515* Standard test method for leaks using bubble emission techniques.
F328 Standard practice for calibration of an airborne particle counter using monodispense spherical particles.
F649 Standard practice for secondary calibration of airborne particle counter using comparison procedures.
E515* Standard test method for leaks using bubble emission techniques.
ANSI Standards
ANSI/ESD S20.20-1999* ESD association standard for the development of an electrostatic discharge control program for protection of electrical and electronic parts, assemblies and equipment (excluding electrically initiated explosive devices)
ANSI-FCI 70-2 (1976)* Control valve seat leakage.
FCI 75-1 (1979) Test conditions and procedures for measuring electrical characteristics of solenoid valves.
NFPA/T.3.5.15M-1986 Hydraulic fluid power - valves - method for determining the internal leakage characteristics.
PPI Standards
TF-3/98 Policies and procedures for developing recommended hydrostatic design stresses for thermoplastic pipe materials.
DOT/UN Standards
Title 49 CFR, Part 178 Performance - oriented packaging standards
UN Chapter 9 General recommendations on packaging
UN Chapter 8 Recommendation on intermediate bulk containers
ISO Standards
ISO/TR 9080 Method of hydrostatic-stress rupture data extrapolation.
ISO 8233-1988* Thermoplastics valves - torque - test method.
ISO 8659-1989* Thermoplastics valves - fatigue strength - test method.
ISTA Standards
Procedure 1A* Packaged - products weighing 150 lb (68 kg) or less.
Basic requirements: fluid displacement vibration and shock testing.
Procedure 2A* Packaged - products weighing 150 lb (68 kg) or less.
Basic requirements: atmospheric conditioning, compression, fixed displacement or random vibration and shock testing.
SEMI Standards
F7 Test method to determine the tensile strength of tube fitting connections made of fluorocarbon materials.
F8 Test method for evaluating the sealing capabilities of tube fitting connections made of fluorocarbon materials when subjected to tensile forces.
F9 Test method to determine the leakage characteristics of tube fitting connections made of fluorocarbon materials when subjected to a side load condition.
F10 Test method to determine the internal pressure required to produce a failure of a tube fitting connection made of fluorocarbon materials.
F11 Test method to obtain an indication of the thermal characteristics of tube fitting connections made of fluorocarbon materials.
F12 Test method to determine the sealing characteristics of tube fitting connections made of fluorocarbon materials after being subjected to a heat cycle.
F18 Guide for determining the hydrostatic strength of, and design basis for, thermoplastic pipe and tubing.
F32 Guide for determining the hydrostatic strength of, and design basis for, thermoplastic pipe and tubing.
F57 Test method for determining flow coefficient for high purity shutoff valves. Specification for polymer components used in ultrapure water and liquid chemical distribution systems.
ISA Standards
ISA-S75.02 Control valve capacity test procedures.
ETM Standard, Entegris Fluid Handling Products Test Method
ETM-101 Test method for hydraulic burst.
ETM-102 Pressure envelope cyclic fatigue testing.
ETM-103 Thermal transition testing of piping products.
ETM-104A Seat leakage of valves using the "Bubble Leak" method.
ETM-105 Tensile testing of piping components.
ETM-106 Pressure cycle fatigue testing of valves.
ETM-107 Seal integrity of tube fitting connections using the "Bubble Leak" method.
ETM-109 Deviations/Additions to ISA-S75.02 (control valve capacity test procedures).
ETM-114 Measurement method for particle counting on drums.
ETM-115 Measurement method for chemical entrapment testing.