Gas Purifiers
A wide variety of materials are available to purify gas to parts-per-trillion (ppt) levels.
Our innovative gas microcontamination control solutions effectively remove gaseous contaminants with high reliability, low cost, and high performance. Stand-alone gas purification systems offer in-situ regeneration with advanced control to meet your specifications. Our vast portfolio of gas purifiers and environmentally friendly systems are designed to improve gas consistency, lifetime, and outlet purity in semiconductor, flat panel display, hydrogen energy, and other high-purity applications.
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The Growing Importance of Process Gas Purification
Featured Pictogram
The Growing Importance of Process Gas Purification
Featured Pictogram
The Growing Importance of Process Gas Purification
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Enables the purification of hydrogen produced by electrolyzers to achieve sub-ppm purity levels.
Gases Purified
- Hydrogen (H2)
Efficiently remove numerous impurities with high reliability, low cost, and high performance.
Gases Purified
- Nitrogen (N2)
Our GPU gas purifiers efficiently remove halogenated gases, hydrides, reactive oxides, saturated and unsaturated hydrocarbons, fluorocarbons and chlorocarbons at a variety of flow rates.
Gases Purified
- Other gases
- Xenon (Xe)
- Helium (He)
- Argon (AR)
Our PS2, PS3, PS4 gas purifiers efficiently remove H2O, O2, CO, CO2, H2, N2, and THC at flow rates of up to 150 slpm (9 Nm3/hr).
Gases Purified
- Argon (Ar)
- Hydrogen (H2)
- Nitrogen (N2)
- Helium (He)
Our auto regenerable, PS8, N2 gas purifiers efficiently remove H2O, O2, CO, CO2, and H2 at flow rates of up to 833,333 slpm (50,000 Nm3/hr).
Gases Purified
- Nitrogen (N2)
Our catalyst and adsorber, PS9, N2 bulk gas purifiers efficiently remove H2O, O2, CO, CO2, H2, and THC at flow rates up to 200,000 slpm (12,000 Nm3/hr).
Gases Purified
- Nitrogen (N2)
Our PS5 rare gas purifiers efficiently remove H2O, O2, CO, CO2, H2, N2, and THC at flow rates of up to 5,833 slpm (350 Nm3/hr).
Gases Purified
- Helium (He)
- Argon (Ar)
- Xenon (Xe)
Our auto regenerable, PS7-A, H2 gas purifiers efficiently remove H2O, O2, CO, CO2, and NMHC at flow rates up to 16,667 slpm (1,000 Nm3/hr).
Gases Purified
- Hydrogen (H2)
Our adsorber and getter, PS7-H, H2 gas purifiers efficiently remove H2O, O2, CO, CO2, THC, and N2 at flow rates up to 3,333 slpm (200 Nm3/hr).
Gases Purified
- Hydrogen (H2)
Our cryogenic, PS7-CR, H2 gas purifiers efficiently remove H2O, O2, CO, CO2, THC, and N2 at flow rates of up to 16,667 slpm (1,000 Nm3/hr).
Gases Purified
- Hydrogen (H2)
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