TEPO
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Reference Materials
Applications
- Deposition of doped silicate glass
Specifications
| PHYSICAL PROPERTIES | |||
|---|---|---|---|
| Chemical formula: | C6H15O4P | ||
| Molecular weight: | 182.16 | ||
| Density: | 1.0725 gm/mL | ||
| Boiling point: | 214.5°C (418.1°F) @ 0.1 mm Hg | ||
| Melting point: | -56°C (132.8°F) | ||
| Flash point (closed cup): | 115°C (239°F) | ||
| PURITY ANALYSIS | |||
| Element | Detection Limit ( ppb) | Specification ( ppb) | Analytical Method |
| Aluminum | 0.012 | 0.500 | ICP-MS |
| Antimony | 0.018 | 0.100 | ICP-MS |
| Arsenic | 0.018 | 1.000 | ICP-MS |
| Barium | 0.003 | 0.050 | ICP-MS |
| Beryllium | 0.005 | 0.050 | ICP-MS |
| Bismuth | 0.004 | 0.050 | ICP-MS |
| Boron | 0.334 | 10.000 | ICP-MS |
| Cadmium | 0.005 | 0.050 | ICP-MS |
| Calcium | 0.043 | 1.000 | ICP-MS |
| Cerium | 0.003 | 0.050 | ICP-MS |
| Chromium | 0.007 | 0.050 | ICP-MS |
| Cobalt | 0.005 | 0.150 | ICP-MS |
| Copper | 0.008 | 0.500 | ICP-MS |
| Gallium | 0.004 | 0.100 | ICP-MS |
| Germanium | 0.010 | 0.050 | ICP-MS |
| Gold | 0.006 | 0.100 | ICP-MS |
| Hafnium | 0.005 | 0.200 | ICP-MS |
| Indium | 0.004 | 0.050 | ICP-MS |
| Iridium | 0.004 | 0.050 | ICP-MS |
| Iron | 0.014 | 0.800 | ICP-MS |
| Lead | 0.004 | 0.100 | ICP-MS |
| Lithium | 0.006 | 0.100 | ICP-MS |
| Magnesium | 0.005 | 0.300 | ICP-MS |
| Manganese | 0.038 | 0.100 | ICP-MS |
| Mercury | 0.032 | 0.100 | ICP-MS |
| Molybdenum | 0.008 | 0.100 | ICP-MS |
| Nickel | 0.007 | 0.500 | ICP-MS |
| Niobium | 0.003 | 0.050 | ICP-MS |
| Palladium | 0.010 | 0.050 | ICP-MS |
| Platinum | 0.012 | 0.050 | ICP-MS |
| Potassium | 0.072 | 0.200 | ICP-MS |
| Rhenium | 0.003 | 0.050 | ICP-MS |
| Rhodium | 0.002 | 0.050 | ICP-MS |
| Rubidium | 0.003 | 0.050 | ICP-MS |
| Silver | 0.013 | 0.300 | ICP-MS |
| Sodium | 0.032 | 1.000 | ICP-MS |
| Strontium | 0.004 | 0.050 | ICP-MS |
| Tantalum | 0.003 | 0.050 | ICP-MS |
| Thallium | 0.003 | 0.050 | CP-MS |
| Thorium | 0.004 | 0.050 | ICP-MS |
| Tin | 0.033 | 0.100 | ICP-MS |
| Titanium | 0.015 | 0.200 | ICP-MS |
| Tungsten | 0.006 | 0.050 | ICP-MS |
| Uranium | 0.004 | 0.050 | ICP-MS |
| Vanadium | 0.010 | 0.050 | ICP-MS |
| Zinc | 0.028 | 1.000 | ICP-MS |
| Zirconium | 0.004 | 0.200 | ICP-MS |
| Particle Size | Specification (mL) | Analytical Method | |
| >0.2 µm | 10 | PMS | |
| >0.3 µm | 7 | PMS | |
| >0.5 µm | 5 | PMS | |
| >1.0 µm | 1 | PMS | |
| Parameter | Detection Limit Specification (ppb) | Analytical Method | |
| Assay | — 99.99% | GC | |
| Chloride | — 50 ppb | Typical | |
| Color | — 5 | Typical | |
| Purity | — 99.9999995% | ICP-MS | |
| Water | 1.3 ppm 20 ppm | KF Titrator | |
| MAXIMUM TEPO FILL WEIGHTS FOR ENTEGRIS CANISTERS | |||
| 2-gallon | 7,700 grams | ||
| 5-gallon 19,500 | 19,500 grams | ||
| 10-gallon | 37,000 grams | ||
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