Wafergard® IV HF Mini In-line Gas Filters
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Alloy-22 filters are not recommended for use with O3 gases.
- Ultrapure gas lines
- High-temperature applications
- Dynamic-pressure applications
- New fab construction
- Corrosive gases
*Not recommended for use with O3 gases.
Specifications
Materials | Filter element | Sintered alloy-22 membrane |
Housing | Electropolished VAR 316L stainless steel | |
Downstream cleanliness | <0.03 particles/liter (<1 particle/ft3) >0.01 µm at specified flow | |
Removal rating | ≥0.0015 µm | |
Surface finish interior | ≤5 µin Ra | |
Helium leak rating | Qualified | 2 × 10-10 atm cc/sec |
Tested | 1 × 10-9 atm cc/sec | |
Operating conditions | Maximum inlet pressure | 17.2 MPa (2500 psig) @ 20°C (68°F) |
Maximum forward/reverse differential pressure | 0.8 MPa (120 psid) @ 20°C (68°F) | |
Maximum operating temperature | 450°C (842°F) - inert gases | |
100°C (212°F) - corrosive and reactive gases | ||
Warranty | 5 year | |
Particle retention |
Greater than 99.9999999% (9 LRV) removal of all particles; referenced at the most penetrating particle size | |
Flow rating | Refer to performance data |
Successfully Opted for software Updates
Part Number | Fitting Size and Type | Length |
---|---|---|
WGL045HS3R2 | 1/4" Gasket seal (compatible with VCR Fitting) male inlet/outlet | 84.1 mm (3.31") |
WGL045HS3R4 | 1/2" Gasket seal (compatible with VCR fitting) male inlet/outlet | 84.1 mm (3.31") |
Alloy-22 filters are not recommended for use with O3 gases.