In-Line PTFE Gas Filters


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  • Fitting Size
  • Fitting Type
  • Length
  • Max Operating Pressure
  • Max Temperature
  • Maximum Flow Rate
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  • Process
Cost-effective 0.0015 µm filters for high-flow range on noncritical applications
Fitting Size
  • 1/2"
  • 3/4"
Fitting Type
  • Gasket seal
  • Compression seal
  • Butt weld
Length
  • 210.8 mm (8.30")
  • 222.7 mm (8.77")
  • 225 mm (8.86")
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
Superior particulate filtration for ultrapure gas system filtration. Recommended for inert and reactive gases, the Wafergard® II F Micro In-Line Gas Filters offer excellent compatibility with all classes of semiconductor process gases.
Fitting Size
  • 1/4"
Fitting Type
  • Gasket seal
  • Butt weld tube
Length
  • 84.1 mm (3.31")
  • 73.7 mm (2.90")
Max Operating Pressure
  • 207 bar (3000 psig) @ 23°C (73°)
For use with inert and reactive gases including ozone, these filters provide superior particulate filtration in gas panels, gas cabinets, and anywhere ultrapure gas is required for wafer processing.
Fitting Size
  • 1/4"
  • 1/2"
  • 3/8"
Fitting Type
  • Gasket seal
  • Butt weld tube
  • Compression seal
Length
  • 115.5 mm (4.55")
  • 119.3 mm (4.70")
  • 127 mm (5.00")
  • 133.4 mm (5.25")
Max Operating Pressure
  • 20.7 MPa (207 bar
  • 3000 psig) @ 23°C (73°F)
Wafergard® SG FG Gas filters provide superior particulate filtration to maximize photovoltaic cell and display manufacturing production yields. The PTFE filter elements are compatible with high-purity process gases as well as inert gas and CDA applications.
Fitting Size
  • 1/4"
  • 3/8"
Fitting Type
  • Compression seal
  • Gasket seal
  • NPT
Length
  • 73.7 mm (2.90")
  • 84.1 mm (3.31")
  • 115.5 mm (4.55")
  • 119.3 mm (4.70")
  • 127 mm (5.00")
  • 133.5 mm (5.26")
Max Operating Pressure
  • 20 MPa (200 bar
  • 2900 psid) @ 23°C (73°F)
Cost-effective 0.0015 µm filters for mid-flow range, noncritical applications
Fitting Size
  • 1/4"
  • 3/8"
  • 1/2"
Fitting Type
  • Swagelok®
  • Male VCR®
  • Female NPT
Length
  • 112.7 mm (4.44")
  • 117.9 mm (4.64")
  • 118.7 mm (4.67")
  • 127.0 mm (5.0")
  • 148.0 mm (5.83")
  • 141.0 mm (5.55")
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
These in-line PTFE gas filters are compatible with high-purity gases and provide superior particulate filtration in ultrapure gas applications as well as general nitrogen and CDA applications
Fitting Size
  • 1/4"
  • 3/8"
  • 1/2"
Fitting Type
  • Male VCR®
  • Swagelok®
  • Butt weld tube
Length
  • 112.7 mm (4.44")
  • 117.9 mm (4.64")
  • 118.7 mm (4.67")
  • 127.0 mm (5.00")
  • 133.4 mm (5.25")
  • 141.2 mm (5.6")
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
These filters have excellent compatibility with all classes of semiconductor gases and offer high-efficiency particulate filtration
Fitting Size
  • 3/8"
  • 1/2"
  • 3/4"
Fitting Type
  • Butt weld tube
  • Gasket seal
Length
  • 398 mm (15.68")
  • 295.0 mm (11.6")
  • 225.0 mm (8.86")
Max Operating Pressure
  • 18 bar (250 psig) @ 23°C (73°F)
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