In-Line Stainless Steel Gas Filters


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Wafergard® II SF Half In-line gas filters are the filters of choice for high purity gas systems when all stainless steel constructions is preferred. A state-of-the-art housing assembly eliminated outgassing by minimizing weld area. The all-metal construction is ideal for high temperature and dynamic pressure applications. Its compact size and flexible choice of fittings provides ultimate design efficiency and minimizes engineering costs.
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
Wafergard® II SF Micro XL in-line gas filters are the filters of choice for high purity gas systems when all stainless steel constructions is preferred
Fitting Size
  • 1/4"
Length
  • 84.1 mm (3.31")
  • 50.8 mm (2.00")
Maximum Flow Rate
  • 30 slpm
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
The Gasketgard® In-line Gasket filter is a compact, all-metal filter which fits in palce of standard 1/4", 3/8" and 1/2" VCR® gaskets.
Fitting Size
  • 1/4"
  • 1/2"
  • 3/8"
Length
  • 25 mm (0.98")
  • 25.25 mm (0.99")
  • 29.5 mm (1.16")
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
Process
  • Bulk Gas Delivery
  • Thin Film
  • Deposition
  • Dry Etch
  • Ion Implantation
  • Photolithography
Wafergard® II SF Mini and Mini XL In-line gas filters are the filters of choice for high purity gas systems when all stainless steel constructions is preferred.
Fitting Size
  • 1/2"
  • 1/4"
Fitting Type
  • Gasket seal
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
Process
  • Bulk Gas Delivery
  • Photolithography
  • Deposition
  • Dry Etch
  • Ion Implantation
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