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SUPERSiC® Silicon Carbide Components

High purity silicon carbide replacement for graphite with SiC coating. See how much longer our SUPERSiC-3C will last in your MOCVD process.

SUPERSiC-3C silicon carbide is inert to all process precursors and byproducts which enables process stability and increased lifetime in the LED MOCVD processes. Due to our enhancements, typical PL improvements range from 30-60%.

  • Long lifetime
  • Custom and standard designs

選択を絞り込む
  • Industry
  • Process
2" Disks
2" Disks
2" Disks
SUPERSiC® silicon carbide 2" satellite disk solutions for process stability, extreme robustness and customization for each unique recipe for application.
産業
  • LED
 プロセス
  • Deposition
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G4およびG5システム向けSUPERSiC®交換用ディスクは、プロセスの安定性、PL性能、寿命という3つの重要なパラメータの優位性が実証されています。
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