LED Chamber Components


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  • Industry
  • Process
SUPERSiC® that has been coated with a 75 μm Chemical Vapor Deposition (CVD) SiC coating, which seals the surface. See specifications.
Apparent Density g/cm3 (lb/in3)
  • 3.15 (0.114)
Bulk Density g/cm3 (lb/in3)
  • 2.55 (0.092)
Flexural Strength, MPa (psi)
  • 155 (22,400)
Thermal Conductivity, W/m-K (BTU-ft/hr/ft2 °F)
  • 117 (98)
SUPERSiC silicon carbide 4" satellite disk solutions for process stability, extreme robustness and customization for each unique recipe for application.
Industry
  • LED
Process
  • Deposition
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