Integra® Valves | Entegris

Check Valves

Corrosion-resistant Galtek^® check valves reduce contamination potential in your high-purity chemical applications and provide clean delivery of sophisticated chemicals. An o-ring-free design provides a simple, clean, compact valve with a high flow rate and increased reliability. We offer a full range of 1/4", 1/2", 3/4" and 1" orifice check valves with a variety of industry standard end connections including Flaretek^® and PureBond^®.

CR and CH Series Valves

With a footprint that is smaller than most comparable valves, our valves offer reliable performance and easy serviceability in high-purity, corrosive chemical applications. With no exposed metal hardware, the valve is completely sealed and protected from harsh chemical environments. The high-temperature version is rated to 200°C fluid. Available in a number of 1/4" and 1/2", 2-way and 3-way, manual and pneumatic configurations to meet all of your fluid system needs.

Cynergy® Valves

Whether your applications involve ultrapure water, water for injection, corrosive chemistries or biotechniques, Cynergy^® valves have a beadless weld connection or an industry standard clamp interface for adaptability to existing equipment and compliance with cGMP standards.

EP PFA Valves

We offer a comprehensive line of reliable high-flow, manual and pneumatic valves that meet your needs for large volume chemical delivery. These valves provide chemical resistance in corrosive applications throughout semiconductor, LCD, TFT and flat panel display markets.

Manifolds and Assemblies

Whether a subassembly or an entire system, Entegris can fabricate your unique product utilizing plastic machining, welding, bonding and/or general fabrication. Our experience in fluid handling and with PFA will result in a strong, durable, chemically-resistant solution that meets your needs.

Plug Valves

We offer Magnaflo^® and fast acting Galetk^® plug valves for use in the same applications as traditional ball valves. These valves couple corrosion resistance and a high-purity flow path, offering durable, high flow solutions to aggressive chemical applications.

Needle/Metering Valves

Our portfolio of Accuflo™ metering and needle valves, and Galtek^® needle valves provide reliable options for you to accurately control media flow. The PFA/PTFE wetted construction offers unrivaled durability in your corrosive environments. In-line, angled, and panel mount manual configurations provide enhanced control of sophisticated chemicals in semiconductor and other markets requiring adjusted flow.

SG Series Valves

Ideal where space is limited, our Galtek^® SG Series valves set the standard for small valves with all-PFA wetted surfaces used in CMP and high purity semiconductor fluid handling applications. These 1/4" orifice valves are available in 2-way and 3-way, manual and pneumatic configurations.

Solenoid Valves

All wetted parts in our powerful, compact 1/4" solenoid valves are designed for high-purity and corrosive applications. To meet all of your fluid control needs, our solenoid valve is available in 2-way and 3-way configurations in 12 and 24 VDC, and 100, 115 and 230 VAC.

Stack Valves

This innovatively designed 3-way valve has the ports located on one plane so they may be easily stacked side by side, significantly reducing footprint in your fluid handling system. All wetted surfaces are PFA and PTFE providing chemical resistance suitable for use with high purity chemicals and DI water.

Stopcock Valves

We offer reliable stopcock valves for any instrumentation need. 1/8" orifice valves are available in 2-way, 2-way 90° and 3-way configurations. Various port options are available to meet your fluid handling system needs.