Gas Delivery Cabinet Systems


Narrow Your Selection
  • Gases
  • System Type
  • Industry
  • Process
The TX-4 ™ gas cabinet is designed to safely deliver highly toxic gases for semiconductor applications. The manifold is designed to minimize pressure loss, enabling maximum delivery of phosphine, arsine, or germane from sub-atmospheric gas sources.
Gases
  • AsH3
  • Ph3
System Type
  • Subatmospheric storage and delivery (SAGS type I)
Industry
  • Semiconductor
Process
  • Deposition
If you'd like to add this item to compare, please uncheck one of the other 4 items. If you'd like to add this item to compare, please uncheck one of the other 2 items.