Solid Chemical Delivery Systems

Liquid Chemical Delivery Systems

We provide containers, vaporizers and equipment necessary to safety and effectively store and deliver chemistries to the process chamber for the most advanced processes and challenging chemistries.

Liquid Filters

Controlling contaminants in process streams is a vital way to improve operating efficiency and enable technology advances. Entegris offers a variety of membrane and media to match the chemical compatibility and process conditions of each manufacturing environment.

Precursors

We provide precursors to meet the industry's technical, quality and economic challenges

Process Tool Air Filters

Entegris Tool AMC filters provide superior protection from common AMC in the lab, including acids, bases and organics. Tool AMC filters utilize both standard filtration media and custom media blends to meet various AMC removal requirements.

Premium Graphite Components

Our graphite is tightly controlled to produce materials that have a uniform microstructure and the right balance of strength, grain size and hardness to offer optimum performance for your intended applications.

Graphite Grades

We offer a wide range of graphite materials as well as post processing and machining capabilities to meet the demanding requirements of semiconductor processes. You can choose the right graphite for your application by grain size (one, five and ten micron) and all grades are sold in bulk form or as a custom machined components for specific applications.

SUPERSiC® Silicon Carbide Components

Near net parts are machined in graphite, purified, and subjected to a proprietary conversion process which substitutes pure silicon atoms for carbon atoms. The result is SUPERSIC, our high purity silicon carbide.

SUPERSiC® Silicon Carbide

Our unique conversion process produces the highest quality silicon carbide products available on the market today. We offer a range of SUPERSiC options to meet your demanding requirements.

Cleanroom Air Filters

Cleanroom filtration utilizes unique chemistry to remove critical contaminants at a lower pressure drop. VaporSorb™ cleanroom chemical filters deliver greater than 95% removal efficiency. Implementation is easy in front/rear access frame banks, side access housing units or ceiling fan units.

InVue® Concentration Monitors and Refractometers

Advanced, optically based monitoring and high performance concentration monitors enable greater process efficiency for BEOL, FEOL and sub-fab delivery chemical systems. Our portfolio of InVue® concentration monitors, dissolved oxygen sensors and refractometers provide customers with inline, real-time and scalable monitoring and detection systems.

Gas Delivery Cylinder Systems

We provide a variety of gas packages to fit a wide range of needs. From semiconductor applications to solar processes to flat panel display manufacturing, we have the right gas in the right package and delivery source for you.

Gas Delivery Cabinet Systems

Entegris' high-purity gas cabinet systems have been designed to deliver a full range of processed toxic gases sub-atmospherically, eliminating the risk of catastrophic gas release and ensuring a safer work environment.

Gas Diffusers

Entegris gas diffusers are compatible with most system designs for easy installation or retrofit into load lock chambers, cooling chambers, transfer chambers and process chambers.

Upstream ALD/CVD Precursors