InVue® Concentration Monitors and Refractometers


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Optically based sensor detects and monitors low levels of dissolved oxygen in chemical plating applications
Channels
  • 1
Measurement
  • Dissolved oxygen
Usage
  • In-situ
Process
  • Bulk Chemical Delivery
  • Wet Etch and Clean
  • CMP
  • Fine Chemicals
  • Wafer Manufacturing
  • Chemical Delivery
  • Bioprocessing
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