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Mask Packages

A broad array of Products for mask and reticle handling

Offering products engineered to provide secure mask protection and precise automation interface, increasing yields and minimizing unscheduled downtime.

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Gas Purifiers

A wide variety of materials are available to purify gas to parts-per-trillion (ppt) levels.
Heat Exchangers

The pHasor® X heat exchanger provides maximum heat transfer for process chemicals while preserving absolute fluid purity. It is ideal where controlled fluid temperature is desired or fluid temperature must be to the point of use.
Liquid Filters

Controlling contaminants in process streams is a vital way to improve operating efficiency and enable technology advances. Entegris offers a variety of membrane and media to match the chemical compatibility and process conditions of each manufacturing environment.

Liquid Filter Housings

Liquid filter housings provide a variety of performance and operator safety benefits. Polymer housings are utilized in higher cleanliness applications and those that are more sensitive to metals leaching into the process materials.

Liquid Purifiers

Controlling metal ions and other contaminants in critical process streams is a vital way to improve operating efficiency and enable technology advances. Available with PTFE and PS, PES membrane and ion exchange media, each purifier is designed to reduce defects caused by metal ions and other contaminants.

Photochemical Dispense Pumps

Learn how our two-stage dispense technology with a built-in Impact® 8G filter manifold enables independent filtration and dispense. Available for low-, medium- and high-viscosity fluids. Communication systems enable you to network your pumps for efficient process monitoring.
Mask Carriers and Shipping Boxes

Offering products engineered to provide secure wafer protection and precise automation interface, increasing yields and minimizing unscheduled downtime
Tubing and Pipe

Entegris offers PFA PureBond® weldable pipe and a variety of FluoroLine® tube materials, including PFA, for use in highly corrosive applications, and industrial grades for less demanding applications.
Plasma Enhanced Chemical Vapor Deposition (PECVD) Coatings

We specialize in silicon and carbon-based coatings using PECVD processes. Highly compatible to fit your business, deposit coatings can be used on a variety of vacuum compatible substrates including metals, alloys, ceramics, semiconductors and polymers. We can coat chambers that can accommodate different shapes and sized items, up to 31" in diameter.
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