Gas Purifiers


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  • Gases Purified
Our GPU gas purifiers efficiently remove halogenated gases, hydrides, reactive oxides, saturated and unsaturated hydrocarbons, fluorocarbons and chlorocarbons at a variety of flow rates.
Gases Purified
  • Other gases
  • Xenon (Xe)
  • Helium (He)
  • Argon (AR)
  • Hydrogen (H2)
  • Carbon dioxide (CO2)
  • Oxygen (O2)
  • Ammonia (NH3)
  • Nitrogen (N2)
  • Extreme clean dry air (XCDA®)
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