Specialty Gases


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  • Cylinder Volume
  • System Type
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Dangerous gases demand the safest technology
Chemical Formula
  • PH3
Cylinder Volume
  • 0.44 L
  • 2.2 L
  • 2.5 L
  • 6.6 L
  • 7.6 L
  • 16 L
System Type
  • Subatmospheric storage and delivery (SAGS type I)
Industry
  • Semiconductor
  • Flat Panel Display
  • Solar
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