Cleanroom Air FiltersControl airborne molecular contamination
Cleanroom filtration utilizes unique chemistry to remove critical contaminants at a lower pressure drop. VaporSorb™ cleanroom chemical filters deliver greater than 95% removal efficiency. Implementation is easy in front/rear access frame banks, side access housing units or ceiling fan units.
SUPERSiC-3C silicon carbide is inert to all process precursors and byproducts which enables process stability and increased lifetime in the LED MOCVD processes. Due to our enhancements, typical PL improvements range from 30-60%.
- Long lifetime
- Custom and standard designs