Caerus™ Coating Technology
ALD Coatings
Caerus™ family of ALD coatings are deposited at low temperatures with superior film quality. Our Caerus coatings are highly conformal, dense, pinhole-free and exhibit homogeneous microstructure. The coatings have excellent adhesion and provide outstanding corrosion and etch resistance properties. They are also characterized by superb electrical voltage stand-off and exceptional trace metal diffusion barrier layer characteristics.
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Caerus™ 100 series is a family of Aluminum-based Oxide coatings that are deposited at low temperatures with superior film quality. See specifications.
Coating Thickness
- Between 10 - 1000 nm
- Fluorine Environments
- >200 GPa
- N/A
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