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50 Years Strong!

Feb. 4, 2017

Corporate Fact Sheet
Narrow Your Selection
  • Fitting Type
  • Length
Wafergard® II SF 3XP Mini in-line gas filters for ultra-high purity (UHP), high-flow gas lines are all 316L stainless steel contractions and are designed with 3x higher flow rate than 3-digit higher retention efficiency than similar filters. Designed for mid-range flow rates up to 500 SLPM and recommended filtration of UHP high-flow applications such as diffusion, annealing, epitaxy tools and connections.
Fitting Size
  • 1/4"
  • 1/2"
Fitting Type
  • Gasket seal
Length
  • 84 mm (3.31")
  • 94 mm (3.70")
  • 126.9 mm (5.00")
  • 133.5 mm (5.26")
Maximum Flow Rate
  • 200 slpm
Wafergard® II SF 3XP Mini XL in-line gas filters for ultra-high purity (UHP), high-flow gas lines are all 316L stainless steel contractions and are designed with 3x higher flow rate than 3-digit higher retention efficiency than similar filters. Designed for mid-range flow rates up to 500 SLPM and recommended filtration of UHP high-flow applications such as diffusion, annealing, epitaxy tools and connections.
Maximum Flow Rate
  • 500 slpm
Wafergard® SF Micro XL in-line gas filters are the filters of choice for high purity gas systems when all stainless steel constructions is preferred. A state-of-the-art housing assembly eliminated outgassing by minimizing weld area. The all-metal construction is ideal for high temperature and dynamic pressure applications. Its compact size and flexible choice of fittings provides ultimate design efficiency and minimizes engineering costs.
Length
  • 84.12 mm (3.31")
Maximum Flow Rate
  • 30 slpm
The Unigard™ filter is an all-in-one filter designed to fit in place of standard 1/4" gasket seal fittings in the gas distribution line.
Fitting Size
  • 1/4"
Fitting Type
  • Gasket seal
Length
  • 39.4 mm (1.55")
The Gasketgard® In-line Gasket filter is a compact, all-metal filter which fits in palce of standard 1/4", 3/8" and 1/2" VCR® gaskets.
Fitting Size
  • 1/4"
  • 1/2"
  • 3/8"
Length
  • 25 mm (0.98")
  • 25.25 mm (0.99")
  • 29.5 mm (1.16")
Linegard™ Micro In-line Gas Filter is a compact in-line gas filter made of 100 percent SUS316L. This economical filter is a safeguard against contamination which may have an adverse effect on critical components.
Fitting Size
  • 1/4"
Fitting Type
  • Gasket seal
  • Compression seal
Length
  • 63.3 mm (2.49")
  • 52.7 mm (2.075")
Wafergard® II SF Mini In-line gas filters are the filters of choice for high purity gas systems when all stainless steel constructions is preferred. A state-of-the-art housing assembly eliminated outgassing by minimizing weld area. The all-metal construction is ideal for high temperature and dynamic pressure applications. Its compact size and flexible choice of fittings provides ultimate design efficiency and minimizes engineering costs.
Find Wafergrad® II SF Mini XL In-Line Gas Filters at Entegris. Industry leading gas filter and gas filtration systems since 1966. Entegris. Creating a material advantage.
Fitting Size
  • 1/4"
  • 1/2"
  • 3/8"
Fitting Type
  • Gasket seal
  • Butt weld tube
  • Compression seal
Length
  • 127 mm (5.00")
  • 115.5 mm (4.55")
  • 119.3 mm (4.70")
  • 133.4 mm (5.25")
Maximum Flow Rate
  • 100 slpm
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