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SEMICON® China Mar. 14, 2018 - Mar. 16, 2018 Pudong, Shanghai, China  Shanghai New International Expo Centre
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  • Chemistry
  • Feature Size
Bulk, bulk and point-of-tool filter housing bowl (component)
Brand Name
  • Chemlock®
Chemistry
  • Aggressive Acids
  • Aggressive Bases
  • Silute Acids
  • Dilute Bases
  • Resist Stripper
  • Solvents
  • Slurry
  • Photochemical
  • DI Water
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
  • Bulk
Bulk and point-of-tool filter-housing-head (component)
Brand Name
  • Chemlock®
Chemistry
  • Aggressive Acids
  • Aggressive Bases
  • Dilute Acids
  • Dilute Bases
  • Resist Stripper
  • Solvents
  • Slurry
  • Photochemical
  • DI Water
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
  • Bulk
Brand Name
  • Chemlock®
Chemistry
  • DI Water
  • Dilute Bases
  • Dilute Acids
  • Slurry
Installation Point
  • Point of Tool
  • Bulk
Feature Size
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
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