Process Tool Air Filters
Protect process equipment and wafers from airborne molecular contamination
Entegris Tool AMC filters provide superior protection from common AMC in the lab, including acids, bases and organics. Tool AMC filters utilize both standard filtration media and custom media blends to meet various AMC removal requirements.
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Our Vaporsorb™ WEC chemical filters deliver complete protection against the full range of airborne molecular contaminants at 22 nm and lower.
Contaminants
- Acids
- Semiconductor
- Wet Etch & Clean
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