TDMAT
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Primary application:
- CVD
- ALD
Specifications
PHYSICAL PROPERTIES | ||
---|---|---|
Chemical formula: | Ti[N(CH3)2]4 | |
Molecular weight: | 224.19 | |
Density: | 0.9467 g/mL @ 20°C | |
Boiling point: | 50°C (122°F) @ 0.5 mm Hg | |
Flash point (closed cup): | -4°C (25°F) | |
Shelf life: | 2 years | |
PURITY ANALYSIS | ||
Element | Specification ( ppb) | Analytical Method |
Aluminum | 25.000 | ICP-MS |
Antimony | 5.000 | ICP-MS |
Arsenic | 5.000 | ICP-MS |
Barium | 10.000 | ICP-MS |
Beryllium | 5.000 | ICP-MS |
Bismuth | 10.000 | ICP-MS |
Cadmium | 5.000 | ICP-MS |
Calcium | 25.000 | ICP-MS |
Chromium | 5.000 | ICP-MS |
Cobalt | 5.000 | ICP-MS |
Copper | 12.500 | ICP-MS |
Gallium | 5.000 | ICP-MS |
Germanium | 5.000 | ICP-MS |
Gold | 5.000 | ICP-MS |
Iron | 10.000 | ICP-MS |
Lead | 5.000 | ICP-MS |
Lithium | 7.500 | ICP-MS |
Magnesium | 10.000 | ICP-MS |
Manganese | 5.000 | ICP-MS |
Mercury | 5.000 | ICP-MS |
Nickel | 10.000 | ICP-MS |
Niobium | 5.000 | ICP-MS |
Palladium | 5.000 | ICP-MS |
Platinum | 5.000 | ICP-MS |
Potassium | 5.000 | ICP-MS |
Silver | 5.000 | ICP-MS |
Sodium | 25.000 | ICP-MS |
Strontium | 12.500 | ICP-MS |
Tantalum | 25.000 | ICP-MS |
Thorium | 5.000 | ICP-MS |
Tin | 5.000 | ICP-MS |
Tungsten | 5.000 | ICP-MS |
Uranium | 5.000 | ICP-MS |
Vanadium | 5.000 | ICP-MS |
Zinc | 25.000 | ICP-MS |
Zirconium | 5.000 | ICP-MS |
Parameter | Specification (%) | Analytical Method |
Assay | 99.5 | NMR |
Purity | 99.9999 | ICP-MS |
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