TEOS
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- CVD
Specifications
PHYSICAL PROPERTIES | |||
---|---|---|---|
Chemical formula: | C8H20O4Si | ||
Molecular weight: | 208.33 | ||
Density: | 0.936 gm/mL | ||
Boiling point: | 169°C (336.2°F) @ 0.1 mm Hg | ||
Melting point: | -86°C (-122.8°F) | ||
Flash point (closed cup): | 51.7°C (-61.06°F) | ||
PURITY ANALYSIS | |||
Element | Detection Limit (ppb) | Specification (ppb) | Analytical Method |
Aluminum | 0.012 | 0.200 | ICP-MS |
Antimony | 0.018 | 0.050 | ICP-MS |
Arsenic | 0.018 | 0.100 | ICP-MS |
Barium | 0.003 | 0.100 | ICP-MS |
Beryllium | 0.005 | 0.050 | ICP-MS |
Bismuth | 0.004 | 0.050 | ICP-MS |
Boron | 0.334 | 10.000 | ICP-MS |
Cadmium | 0.005 | 0.050 | ICP-MS |
Calcium | 0.043 | 0.300 | ICP-MS |
Cerium | 0.003 | 0.050 | ICP-MS |
Chromium | 0.007 | 0.100 | ICP-MS |
Cobalt | 0.005 | 0.100 | ICP-MS |
Copper | 0.008 | 0.100 | ICP-MS |
Gallium | 0.004 | 0.050 | ICP-MS |
Germanium | 0.010 | 0.050 | ICP-MS |
Gold | 0.006 | 0.100 | ICP-MS |
Hafnium | 0.005 | 0.100 | ICP-MS |
Indium | 0.004 | 0.050 | ICP-MS |
Iridium | 0.004 | 0.050 | ICP-MS |
Iron | 0.014 | 0.200 | ICP-MS |
Lead | 0.004 | 0.100 | ICP-MS |
Lithium | 0.006 | 0.050 | ICP-MS |
Magnesium | 0.005 | 0.200 | ICP-MS |
Manganese | 0.038 | 0.100 | ICP-MS |
Mercury | 0.032 | 0.070 | ICP-MS |
Molybdenum | 0.008 | 0.050 | ICP-MS |
Nickel | 0.007 | 0.200 | ICP-MS |
Niobium | 0.003 | 0.050 | ICP-MS |
Palladium | 0.010 | 0.050 | ICP-MS |
Platinum | 0.012 | 0.050 | ICP-MS |
Potassium | 0.072 | 0.500 | ICP-MS |
Rhenium | 0.003 | 0.050 | ICP-MS |
Rhodium | 0.002 | 0.050 | ICP-MS |
Rubidium | 0.003 | 0.050 | ICP-MS |
Silver | 0.013 | 0.200 | ICP-MS |
Sodium | 0.032 | 0.200 | ICP-MS |
Strontium | 0.004 | 0.050 | ICP-MS |
Tantalum | 0.003 | 0.050 | ICP-MS |
Thallium | 0.003 | 0.050 | ICP-MS |
Thorium | 0.004 | 0.050 | ICP-MS |
Tin | 0.033 | 0.050 | ICP-MS |
Titanium | 0.015 | 0.050 | ICP-MS |
Tungsten | 0.006 | 0.050 | ICP-MS |
Uranium | 0.004 | 0.050 | ICP-MS |
Vanadium | 0.010 | 0.050 | ICP-MS |
Zinc | 0.028 | 0.100 | ICP-MS |
Zirconium | 0.004 | 0.070 | ICP-MS |
Particle Size | Specification (mL) | Analytical Method | |
>0.2 µm | 10 | PMS | |
>0.3 µm | 7 | PMS | |
>0.5 µm | 5 | PMS | |
>1.0 µm | 1 | PMS | |
Parameter | Detection Limit | Specification | Analytical Method |
Assay | — | 99.99% | GC |
Chloride | — | 50 ppb | Typical |
Color | — | 5 | Typical |
Purity | — | 99.9999999% | ICP-MS |
Water | 1.3 ppm | 5 ppm | KF Titrator |
MAXIMUM TEOS FILL WEIGHTS FOR ENTEGRIS CANISTERS | |||
5-gallon | 17,700 grams | ||
10-gallon | 35,200 grams | ||
200-liter | 200,000 grams |
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