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SG Series Valves

Space saving solutions for CMP and high purity fluid handling applications

Ideal where space is limited, our Galtek® SG Series valves set the standard for small valves with all-PFA wetted surfaces used in CMP and high purity semiconductor fluid handling applications. These 1/4" orifice valves are available in 2-way and 3-way, manual and pneumatic configurations.

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EP PFA Valves

We offer a comprehensive line of reliable high-flow, manual and pneumatic valves that meet your needs for large volume chemical delivery.  
Integra® Valves

High-purity, corrosion-resistant Integra® valves offer reliable performance in high-purity, aggressive chemical applications. With no external metal parts, the valves are safe and will not corrode in harsh environments. 
Solenoid Valves

All wetted parts in our powerful, compact 1/4" solenoid valves are designed for high-purity and corrosive applications. 
Stack Valves

This innovatively designed 3-way valve has the ports located on one plane so they may be easily stacked side by side, significantly reducing footprint in your fluid handling system. 
Plug Valves

We offer Magnaflo® and fast acting Galtek® plug valves that provide durable, corrosion-resistance in aggressive chemical applications. For use in the same applications as traditional ball valves.
Stopcock Valves

We offer reliable stopcock valves for any instrumentation need. 1/8" orifice valves are available in 2-way, 2-way 90° and 3-way configurations.
Check Valves

Corrosion-resistant Galtek® check valves reduce contamination potential in your high-purity chemical applications. An O-ring-free design provides a simple, clean, compact valve with a high flow rate.  
Manifolds and Assemblies

Whether a subassembly or an entire system, Entegris can fabricate your unique product utilizing plastic machining, welding, bonding and/or general fabrication. 
Valve Accessories

Learn about the numerous accessories available that help you secure and maintain Entegris valves used in ultrapure, corrosive fluid applications. 
Cynergy® Valves

Cynergy® valves with beadless weld or industry standard clamp connections are designed for applications involving ultrapure water, water for injection, corrosive chemistries or biotechniques.
Needle/Metering Valves

Our portfolio of Accuflo™ metering and needle valves, and Galtek® needle valves provide reliable options for you to accurately control media flow in corrosive environments.
Integra® Plus WS ESD Valves

The weir-style valve body design streamlines the flow path and eliminates dead volume; ideal in CMP slurry and bulk chemical applications, pneumatic actuation.

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