Wafergard® III NF-75 In-line Gas Filters
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Note: Nickel filters are not recommended for use with CO, O3, and low-level hydride dopant gases.
- Ultrapure gas lines
- High-temperature applications
- Valve-manifold boxes
- New fab construction
- Dynamic-pressure applications
- Inert and reactive gases
Note: Not recommended for use with CO, O3, and low level hydride dopant gases.
Specifications
Materials | Filter element | Patented, sintered nickel membrane filter | |
Housing | Electropolished VAR 316L stainless steel housing | ||
Downstream cleanliness | Particles1 | Less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm | |
Volatiles2 | Volatile outgassing of H2O, O2, and THC is below detectable limits (by RGA and FID at room temperature) | ||
Removal rating | ≥0.0015 μm | ||
Surface finish interior | ≤5 μin Ra | ||
Helium leak rating | Qualified | 2 × 10-10 atm cc/sec | |
Tested | 1 × 10-9 atm cc/sec | ||
Maximum Operating conditions | Maximum inlet pressure | 70 bar (1000 psi) @ 100°C | |
Maximum forward/reverse differential pressure | 10 bar (150 psid) | ||
Maximum operating temperature | Inert gases | 400°C @ 35 bar (500 psi) | |
Corrosive and reactive gases | 50°C @ 70 bar (1000 psi) | ||
Warranty | 5 year | ||
Particle retention | Greater than 99.9999999% (9 LRV) removal of all particles at maximum rated flow (referenced at the most penetrating particle size) | ||
Flow rating | See performance data | ||
1Particle cleanliness qualified following SEMASPEC Test Method for Particle Shedding (#93021511A-STD). 2Volatile cleanliness qualified following SEMASPEC Test Methods for: THC Contribution (#90120396B-STD), Moisture Contribution (#90120397B-STD), and Oxygen Contribution (#90120398B-STD). |
Successfully Opted for software Updates
Part Number | Fitting Size and Type | Length |
---|---|---|
WG3NS4JJ2 | 1/4" Butt weld tube | 71.4 mm (2.81") |
WG3NS4RR2 | 1/4" Gasket seal (compatible with VCR Fitting) male inlet/outlet | 127.0 mm (5.00") |
WG3NS7SL2 | 1/4" Gasket seal (compatible with VCR Fitting) male inlet/outlet | 84.1 mm (3.31") |
Note: Nickel filters are not recommended for use with CO, O3, and low-level hydride dopant gases.