Mask Carriers and Shipping Boxes


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Enabling Advanced Lithography: The Challenges of Storing and Transporting EUV Reticles
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  • Carrier Material
  • Mask Size
  • Capacity
  • Industry
  • Process
The A189 Series Mask Carriers are used for masks or reticles to optimize wafer and device handling in your facilities, we offer silicon delivery systems and services.
Carrier Material
  • PVDF
  • HDPE
  • Black polypropylene
Mask Size
  • 51 mm sq. (2" sq.)
  • 64 mm sq. (2.5" sq.)
  • 76 mm sq. (3.0" sq.)
  • 89 mm sq. (3.5" sq.)
  • 102 mm sq. (4.0" sq.)
  • 114 mm sq. (4.5" sq.)
  • 127 mm sq. (5.0" sq.)
  • 152 mm sq. (6.0" sq.)
  • 178 mm rnd (7" rnd)
  • 203 mm sq. (8" sq.)
Space for Pellicles
  • None
  • Top
  • Bottom
  • Double
Capacity
  • 1
  • 4
  • 6
  • 10
  • 20
  • 25
  • 30
Entegris’ E Series line of shipping boxes are ideal for masks or reticles. Available in a variety of sizes, the carriers and boxes are purchased as an assembly.
Box Material
  • Blue ABS
  • Polystyrene
Carrier Material
  • PVDF
  • HDPE
  • Black polypropylene
Mask Size
  • 51 mm sq. (2" sq.) to 178 mm rnd (7" rnd)
Space for Pellicles
  • None
  • Top
  • Bottom
  • Double
Entegris offers a variety of carrier sizes and shapes to fit miscellaneous masks.
Carrier Material
  • PFA
  • Polypropylene
Mask Size
  • 76 mm sq. (3" sq.) to 127 mm sq. (5" sq.)
Space for Pellicles
  • None
  • Top
  • Bottom
  • Double
Capacity
  • 4
  • 20
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