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CMP Cleaning Brushes

Post-CMP cleaning brushes designed to achieve uniform fluid distribution on the brush surface.

Our portfolio of Planarcore® PVA brushes delivers superior performance and wafer-to-wafer uniformity in post-CMP wafer cleaning applications. The unique molded-through-the-core technology provide absolute adhesion of the PVA (polyvinyl alcohol) to the brush core.

Featured Information

download-pdf
Yield Advantages Through Maintaining and Upgrading FOUP Populations
Request White Paper

Featured Information

download-pdf
Yield Advantages Through Maintaining and Upgrading FOUP Populations
Request White Paper

Featured Information

download-pdf
Yield Advantages Through Maintaining and Upgrading FOUP Populations
Request White Paper
Narrow Your Selection
  • OEM Tool
  • Industry
Planarcore® PVA Brushes
Planarcore® PVA Brushes
Planarcore® PVA Brushes
Rapid changeout and high performance for the most critical post CMP clean applications
Brand Name
  • Planarcore®
 OEM Tool
  • Applied Materials Reflexion®
  • Applied Materials Mirra Mesa®
  • EBARA F-REX300
  • Lam Research OnTrak® series
 Preservative
  • NH4OH
  • H2O2
 Process Platform
  • 200 mm
  • 300 mm
Related Product Categories
200 mm Wafer Processing

With over 50 years of experience in advanced wafer handling and transport, Entegris continues to provide safe and reliable 200 mm wafer processing solutions.
150 mm Wafer Processing

To support the semiconductor industry's requirements for advanced 150 mm wafer handling, we offer a variety of wafer carriers, handling solutions and accessories that safely transport your silicon wafers.
125 mm Wafer Processing

Reliable wafer carriers and storage boxes that address the automation, contamination, and productivity concerns of today's 125 mm (5") fabs.

150 mm and Smaller Wafer Carrier Accessories

Learn about the numerous wafer carrier handles, wafer retainers, storage box cushions, and traveler envelopes available for use with our 150 mm (6"), 125 mm (5"), and 100 mm (4") wafer storage and handling products.
100 mm Wafer Processing

With over 50 years of experience in advanced wafer handling and transport, Entegris continues to provide 100 mm (4") wafer processing solutions to safely and reliably transport and protect silicon wafers.

300 mm Front Opening Unified Pods (FOUPs)

Our FOUPs (front-opening unified pods) hold 300 mm wafers safely and securely while they are transported and transferred within the fab as they move through hundreds of sophisticated process steps. Designed to address not only particles but to also minimize and control VOC, oxygen, and relative humidity (RH), our FOUPs provide superior microenvironment control, optimum automation integration, and low cost of ownership.
200 mm Accessories

Optimize the cleanliness and performance of your A200 and M200 wafer microenvironments with E200 door assemblies, replacement gaskets, handles, door seal kits, and more. 
Labware

We offer a wide variety of labware products to assist with wafer processing. Learn about our tweezers, tongs, vacuum probes, beakers, funnels strainers, dippers, baskets, trays, and more.
76.2 mm 3" Wafer Processing

With over 50 years of experience in advanced wafer handling and transport, Entegris continues to provide 76.2 mm (3") wafer processing solutions to safely and reliably transport and protect silicon wafers.

Chucks

Our chuck solutions use innovative coating technologies which make for a very flat surface that prevents metal contamination, reduces particles and is durable to last millions of wafer cycles.
2.5" and Smaller Wafer Processing

With over 50 years of experience in advanced wafer handling and transport, Entegris continues to provide 2.5" and smaller wafer processing solutions to safely and reliably transport and protect silicon wafers.

CMP Pads

Our portfolio of CMP pads provides exact hardness, pore sizes, and compressibility to meet CMP application requirements

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