Entegris is a global leader in contamination control, critical materials handling, and advanced process materials for the semiconductor and other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.
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For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
The ProE-Vap® 200 delivery system is designed for solid precursors used in Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD) processes. It provides a stable mass flux for a wide variety of solid materials used for current and future technology nodes. Solid precursors are difficult to deliver consistently into deposition chambers due to their low vapor pressure and limited thermal stability. The ProE-Vap 200 system overcomes these problems and offers a solution that is unmatched in the industry.
More than seven times higher fill capacity than the ProE-Vap 100
Higher flux applications including batch furnaces
Holds 7X more chemistry for less down time for source changes
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ApplicationsProE-Vap® 200 Delivery System Applications