UltraPur™ 4MS
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- Precursor for OSG by PECVD
- Precursor for SixCyNz deposition
Specifications
PHYSICAL PROPERTIES | |||
---|---|---|---|
Chemical formula: | (CH3)4Si | ||
Molecular weight: | 88.22 | ||
Specific gravity: | 0.65 | ||
Boiling point: | 26.7°C (80.1°F) @ 0.1 mm Hg | ||
Melting point: | -99°C (-146.2°F) | ||
Flash point (closed cup): | -27°C (-16.6°F) | ||
PURITY ANALYSIS | |||
Element | Detection Limit ( ppb) | Specification ( ppb) | Analytical Method |
Aluminum | 0.012 | 2.000 | ICP-MS |
Antimony | 0.018 | 0.500 | ICP-MS |
Arsenic | 0.018 | 0.500 | ICP-MS |
Barium | 0.003 | 0.500 | ICP-MS |
Beryllium | 0.005 | 0.500 | ICP-MS |
Bismuth | 0.004 | 0.500 | ICP-MS |
Boron | 0.334 | 5.000 | ICP-MS |
Cadmium | 0.005 | 0.500 | ICP-MS |
Calcium | 0.043 | 10.000 | ICP-MS |
Chromium | 0.007 | 0.500 | ICP-MS |
Cobalt | 0.005 | 0.500 | ICP-MS |
Copper | 0.008 | 0.500 | ICP-MS |
Gallium | 0.004 | 0.500 | ICP-MS |
Germanium | 0.010 | 0.500 | ICP-MS |
Gold | 0.006 | 0.500 | ICP-MS |
Iron | 0.014 | 5.000 | ICP-MS |
Lead | 0.004 | 0.500 | ICP-MS |
Lithium | 0.006 | 0.500 | ICP-MS |
Magnesium | 0.005 | 3.000 | ICP-MS |
Manganese | 0.038 | 0.500 | ICP-MS |
Mercury | 0.032 | 0.500 | ICP-MS |
Molybdenum | 0.008 | 0.500 | ICP-MS |
Nickel | 0.007 | 0.500 | ICP-MS |
Niobium | 0.003 | 0.500 | ICP-MS |
Potassium | 0.072 | 1.000 | ICP-MS |
Silver | 0.013 | 0.500 | ICP-MS |
Sodium | 0.032 | 2.000 | ICP-MS |
Strontium | 0.004 | 0.500 | ICP-MS |
Tantalum | 0.003 | 0.500 | ICP-MS |
Thallium | 0.003 | 0.500 | ICP-MS |
Thorium | 0.004 | 0.500 | ICP-MS |
Tin | 0.033 | 0.500 | ICP-MS |
Titanium | 0.015 | 0.500 | ICP-MS |
Element | Detection Limit (ppb) | Specification (ppb) | Analytical Method |
Uranium | 0.004 | 0.500 | ICP-MS |
Vanadium | 0.010 | 0.500 | ICP-MS |
Zinc | 0.028 | 0.500 | ICP-MS |
Zirconium | 0.004 | 0.500 | ICP-MS |
Parameter | Detection Limit | Specification | Analytical Method |
Assay | — | 99.99% | GC |
Chloride | — | 1 ppm | Typical |
Color | — | 10 | Typical |
Purity | — | 99.99999% | ICP-MS |
Water | 1.3 ppm | 20 ppm | KF Titrator |
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