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For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
UltraPur™ HfCl4 is a solid metallic halide used as a precursor for the formation of the high-k Metal Gate (HKMG) transistors and capacitor structures. In the ALD process, HfCl4 provides the source of Hf and a second precursor such as water or O3 as the source of oxygen.
Semiconductor grade purity
ProE-Vap® delivery system for solid delivery system
Two-year shelf life
Post fill morphology treatment to eliminate particle excursions
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*All units in parts per million (ppm). Purity based on elements specified = 99.7%.