TDMAT
Primary application:
- CVD
- ALD
Specifications
| PHYSICAL PROPERTIES | ||
|---|---|---|
| Chemical formula: | Ti[N(CH3)2]4 | |
| Molecular weight: | 224.19 | |
| Density: | 0.9467 g/mL @ 20°C | |
| Boiling point: | 50°C (122°F) @ 0.5 mm Hg | |
| Flash point (closed cup): | -4°C (25°F) | |
| Shelf life: | 2 years | |
| PURITY ANALYSIS | ||
| Element | Specification ( ppb) | Analytical Method |
| Aluminum | 25.000 | ICP-MS |
| Antimony | 5.000 | ICP-MS |
| Arsenic | 5.000 | ICP-MS |
| Barium | 10.000 | ICP-MS |
| Beryllium | 5.000 | ICP-MS |
| Bismuth | 10.000 | ICP-MS |
| Cadmium | 5.000 | ICP-MS |
| Calcium | 25.000 | ICP-MS |
| Chromium | 5.000 | ICP-MS |
| Cobalt | 5.000 | ICP-MS |
| Copper | 12.500 | ICP-MS |
| Gallium | 5.000 | ICP-MS |
| Germanium | 5.000 | ICP-MS |
| Gold | 5.000 | ICP-MS |
| Iron | 10.000 | ICP-MS |
| Lead | 5.000 | ICP-MS |
| Lithium | 7.500 | ICP-MS |
| Magnesium | 10.000 | ICP-MS |
| Manganese | 5.000 | ICP-MS |
| Mercury | 5.000 | ICP-MS |
| Nickel | 10.000 | ICP-MS |
| Niobium | 5.000 | ICP-MS |
| Palladium | 5.000 | ICP-MS |
| Platinum | 5.000 | ICP-MS |
| Potassium | 5.000 | ICP-MS |
| Silver | 5.000 | ICP-MS |
| Sodium | 25.000 | ICP-MS |
| Strontium | 12.500 | ICP-MS |
| Tantalum | 25.000 | ICP-MS |
| Thorium | 5.000 | ICP-MS |
| Tin | 5.000 | ICP-MS |
| Tungsten | 5.000 | ICP-MS |
| Uranium | 5.000 | ICP-MS |
| Vanadium | 5.000 | ICP-MS |
| Zinc | 25.000 | ICP-MS |
| Zirconium | 5.000 | ICP-MS |
| Parameter | Specification (%) | Analytical Method |
| Assay | 99.5 | NMR |
| Purity | 99.9999 | ICP-MS |
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