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UltraPur™ 4MS

UltraPur™ 4MS is a precursor used in the chemical vapor deposition (CVD) of low-k inter-metal dielectric films (IMDs) for sub-0.25 µm IC interconnects.

  • 4MS is offered in the highest purity available to the industry which serves to minimize key film performance variables
  • Reliable material supply
  • Research and development support for materials compatibility
  • Robust delivery system
  • On-board ampoule refillable technology
  • Standard shelf life 12 months
  • Read More Read Less
Interested in UltraPur™ 4MS?

Contact your Entegris account manager or  contact us

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