Transition Metal Precursors
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- ALD/CVD precursors for semiconductor deposition
- Low temperature ALD processes
- Amido and imido complexes
- Clean ligand release with water or ozone
Specifications
Capabilities
(Reference numbers are shown on graphics above)
With over twenty years of investment and expertise, Entegris is a leader in the high-volume manufacture of high-purity metalorganics based on Group IV and Group V metals and beyond. This capability requires specific know-how in the safe handling of corrosive transition metal halides in both liquid and solid state, manipulation of pyrophoric reagents, and usage of liquefied gases. As such, we have developed agile processes that allow for convenient customized syntheses of products with motifs such a 1 and 2.
As an example, for a product with a motif of 1, where base elements include Ti, Zr, and Hf, the amido ligands can be varied to suit specific physical properties or applications. The R and R’ substituent can be the same or different depending on the targeted function; and can be drawn from a wide range of alkyl groups. Similarly, products with a motif of 2, where elements include Nb and Ta, have an additional point for derivatization. tert-Butyl groups are commonly found as the imido substituent on compounds such as 2, but other large alkyl groups such as neo-pentyl and tert-pentyl have shown to be effective on precursors for deposition.
Tetrakis(ethylmethylamido)zirconium (TEMAZ) | ||||
Chemical formula: | C12H32N4Zr | Boiling point: | 81°C (178°F), 0.1 mm/Hg | |
Molecular weight: | 323.63 g/mol | Flash point: | 11°C (52°F) | |
CAS #: | 175923-04-3 | Density: | 1.049 g/mL |
Purity Analysis | ||
Parameter | Specification | Analytical method |
Assay | 99.5% | 1H NMR |
Chloride | ≤10 ppm | IC |
Aluminum | <50 ppb | ICP-MS |
Antimony | <50 ppb | ICP-MS |
Arsenic | <50 ppb | ICP-MS |
Barium | <50 ppb | ICP-MS |
Beryllium | <50 ppb | ICP-MS |
Boron | <50 ppb | ICP-MS |
Cadmium | <50 ppb | ICP-MS |
Calcium | <50 ppb | ICP-MS |
Chromium | <50 ppb | ICP-MS |
Cobalt | <50 ppb | ICP-MS |
Copper | <50 ppb | ICP-MS |
Gallium | <50 ppb | ICP-MS |
Germanium | <50 ppb | ICP-MS |
Hafnium | <20,000 ppb | ICP-MS |
Iron | <50 ppb | ICP-MS |
Lead | <50 ppb | ICP-MS |
Lithium | <50 ppb | ICP-MS |
Magnesium | <50 ppb | ICP-MS |
Manganese | <50 ppb | ICP-MS |
Molybdenum | <50 ppb | ICP-MS |
Nickel | <50 ppb | ICP-MS |
Potassium | <50 ppb | ICP-MS |
Sodium | <50 ppb | ICP-MS |
Strontium | <50 ppb | ICP-MS |
Thallium | <50 ppb | ICP-MS |
Thorium | <50 ppb | ICP-MS |
Tin | <50 ppb | ICP-MS |
Titanium | <500 ppb | ICP-MS |
Tungsten | <50 ppb | ICP-MS |
Uranium | <50 ppb | ICP-MS |
Vanadium | <50 ppb | ICP-MS |
Zinc | <50 ppb | ICP-MS |
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