CR4 Series Pneumatic Valves, 1/4" Orifice, 3-way, Tube
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- Pillar nuts, inserts and gauge rings included as standard.
- High-purity corrosive chemical handling
- All semiconductor wet etch and clean (WEC) process chemicals
- Chemical line sizes 3/8" or smaller
Specifications
Sensing Option Dimensional Information (shown in 4th drawing above)
A Remote Position Indication option is available to monitor valve open and closed positions electronically.
Note: To enable the remote position indication option you must special order the Omron® sensor (-OM) on the valve. In addition, order Omron position sensor indicator (EE-SX771R or EE-SX771A), which are sold separately.
Durable Valves for Harsh Environments
- With no exposed metal hardware, the CR4 Series valve is completely sealed and protected from harsh chemical environments
- The modular design enables manifold customization into your fluid delivery system
- Designed with the same footprint as our stand-alone and manifold Galtek® SG Series valves and Dymension® valve manifolds, allowing for easy retrofits or replacement
| Port Connection | Flow Factor CV | Flow Factor KV | Dimensions | ||
| A | B | C | |||
| 1/4" FNPT | 0.6 | 8.6 | 1.96" (49.8 mm) | 1.79" (45.5 mm) | 0.98" (24.9 mm) |
| 1/4" Flaretek* | 0.3 | 4.0 | 2.99" (76.0 mm) | 2.30" (58.4 mm) | 1.50" (38.1 mm) |
| 1/4" PureBond | 0.6 | 8.6 | 3.00" (76.2 mm) | 2.31" (58.7 mm) | 1.50" (38.1 mm) |
| 1/4" Super 300 Type Pillar fitting | 0.3 | 4.0 | 2.34" (59.4 mm) | 1.98" (50.3 mm) | 1.17" (29.7 mm) |
| 3/8" Flaretek* | 0.6 | 8.6 | 3.07" (78.0 mm) | 2.34" (59.4 mm) | 1.54" (39.1 mm) |
| 3/8" Super 300 Type Pillar fitting | 0.6 | 8.6 | 2.85" (72.4 mm) | 2.23" (56.6 mm) | 1.43" (36.3 mm) |
*Also available in PrimeLock® or Flaretek “SpaceSaver” port connections. Contact Entegris for ordering information.
| Materials: | All-wetted parts | PTFE, PFA | ||
| Exterior actuator parts | PVDF, Viton® | |||
| Interior actuator parts | PVDF, SST, Viton | |||
| Mounting base | PVDF | |||
| Operating conditions: | Media pressure at | 21°C (70°F) | All ports | 552 kPa (80 psig)1 |
| 130°C (266°F) | Common port | 276 kPa (40 psig)1 | ||
| 130°C (266°F) | Normally open/closed ports | 207 kPa (30 psig)1,2 | ||
| Actuation pressure | 21°C (70°F) | 414–552 kPa (60–80 psig)1 | ||
| 130°C (266°F) | 414–483 kPa (60–70 psig)1 | |||
| Temperature range | Ambient | 21°– 50°C (70°–122°F)1 | ||
| Fluid | 21°–130°C (70°– 266°F)1 | |||
| Pneumatic supply port: | 1/4" tube stub | |||
| Environmental compliance: | RoHs, WEE | |||
1Actual valve performance varies with pressure and temperature; refer to actual ratings in performance data
2If media temperatures are 100°C or more, it is recommended to remove or cycle actuation pilot pressure when temperature is reduced to 30°C or less.
Successfully Opted for software Updates
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01-006010
Mounting base for use with all 1/4" 3-way CR4 Series and SG Series valves
| Part Number | Options | Port Connection |
|---|---|---|
| CR4-3C-4F | PVDF Flaretek® nut | 1/4" Flaretek® |
| CR4-3C-4F-3 | PFA Flaretek® nut | 1/4" Flaretek® |
| CR4-3C-4F-II | PFA FlareLock® II nut | 1/4" Flaretek® |
| CR4-3C-4F-OM | Omron position sensor | 1/4" Flaretek® |
| CR4-3C-4N | N/A | 1/4" FNPT |
| CR4-3C-4N-OM | Omron position sensor | 1/4" FNPT |
| CR4-3C-4P-OM | Omron position sensor | 1/4" PureBond® pipe |
| CR4-3C-4PS3-N | Super 300 Type Pillar® nut included | 1/4" Super 300 Type Pillar® |
| CR4-3C-6F | PVDF Flaretek® nut | 3/8" Flaretek® |
| CR4-3C-6F-3 | PFA Flaretek® nut | 3/8" Flaretek® |
| CR4-3C-6F-II | PFA FlareLock® II nut | 3/8" Flaretek® |
| CR4-3C-6F-OM | Omron position sensor | 3/8" Flaretek® |
- Pillar nuts, inserts and gauge rings included as standard.