Integra® Plus WS Manual Valves, 1 1/4", 2-way, Multi-turn
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Notes:
- Not all configurations are permitted. Contact Entegris if multiple special order features are required.
- Contact Entegris if "SpaceSaver" port connections are to be used in media containing a fluorinated surfactant.
- Bulk chemical delivery (BCD) lines within semiconductor fabs
- Chemical mechanical planarization (CMP) slurry dispense
- Wet etch and clean (WEC) ultrapure chemical handling
- TFT/LCD corrosive chemical handling
Specifications
Port Connection | Flow factor Cv | Flow factor Kv | Dimensions | ||
A | B | C | |||
1" PureBond pipe | 23.8 | 339.9 | 155.4 mm (6.12") | 35.1 mm (1.38") | 174.2 mm (6.86") |
1 1/4" PrimeLock | 25.8 | 368.4 | 182.9 mm (7.20") | 35.1 mm (1.38") | 174.2 mm (6.86") |
Materials of construction | All wetted parts: | PFA, PTFE | |
Exterior actuator parts: | PVDF | ||
Interior actuator parts: | PVDF, Viton®, EPDM and PTFE | ||
Operating conditions | Media pressure at: | ||
21°C (70° F) vacuum | Inlet/outlet | 913 mbar (27" Hg) to 552 kPa (80 psig) | |
100°C (212°F) | Inlet/outlet | 275 kPa (40 psig)* | |
Temperature range: | |||
Ambient | 21°-50°C (70°-122°F) | ||
Fluid | 21°-100°C (70°-212°F) | ||
Environmental compliance: | RoHs, WEEE |
*Actual valve performance varies with pressure and temperature; refer to actual ratings in performance data.
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01-1030870
Safety Lock Out, 3/4", 1", 1 1/4" Integra® Plus WS manual valves
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WSP-MAN-RKIT
Repair kit for 3/4", 1", or 1 1/4" Integra® Plus WS 2-way, manual multi-turn weir valves
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WSP-MAN-EC-RKIT
Repair kit for 3/4", 1", or 1 1/4" Integra® Plus WS 2-way, manual multi-turn weir valves with ECTFE actuators
Part Number | Port 1 Connection | Port 2 Connection | Options |
---|---|---|---|
WSP20-2M-16P20K | 1" PureBond® pipe | 1 1/4" PrimeLock® | N/A |
WSP20-2M-16P20K-EC | 1" PureBond® pipe | 1 1/4" PrimeLock® | ECTFE actuator with PFA nut |
WSP20-2M-16P20V | 1" PureBond® pipe | 1 1/4" PrimeLock® "SpaceSaver" | N/A |
WSP20-2M-16P20V-EC | 1" PureBond® pipe | 1 1/4" PrimeLock® "SpaceSaver" | ECTFE actuator with PFA nut |
WSP20-2M-20KK | 1 1/4" PrimeLock® | 1 1/4" PrimeLock® | N/A |
WSP20-2M-20KK-EC | 1 1/4" PrimeLock® | 1 1/4" PrimeLock® | ECTFE actuator with PFA nut |
WSP20-2M-20KV | 1 1/4" PrimeLock® | 1 1/4" PrimeLock® "SpaceSaver" | N/A |
WSP20-2M-20KV-EC | 1 1/4" PrimeLock® | 1 1/4" PrimeLock® "SpaceSaver" | ECTFE actuator with PFA nut |
WSP20-2M-20VV | 1 1/4" PrimeLock® "SpaceSaver" | 1 1/4" PrimeLock® "SpaceSaver" | N/A |
WSP20-2M-20VV-EC | 1 1/4" PrimeLock® "SpaceSaver" | 1 1/4" PrimeLock® "SpaceSaver" | ECTFE actuator with PFA nut |
Notes:
- Not all configurations are permitted. Contact Entegris if multiple special order features are required.
- Contact Entegris if "SpaceSaver" port connections are to be used in media containing a fluorinated surfactant.