Integra® Plus WS Manual Valves, 1", 2-way, Multi-turn
To discuss your specific needs, contact your local Entegris representative.
Don't have an Entegris representative?
Contact UsThank you for requesting a quote. Someone from Entegris will contact you shortly.
Your quote number is {0}.
Note:
- Not all configurations are permitted. Contact Entegris if multiple special order features are required.
- Bulk chemical delivery (BCD) lines within semiconductor fabs
- Chemical mechanical planarization (CMP) slurry dispense
- Wet etch and clean (WEC) ultrapure chemical handling
- TFT/LCD corrosive chemical handling
Specifications
Port Connection | Flow factor Cv | Flow factor Kv | Dimensions | ||
A | B | C | |||
1" PrimeLock | 25.8 | 368.4 | 166.1 mm (6.54") | 35.1 mm (1.38") | 174.2 mm (6.86") |
1" Flaretek | 25.8 | 368.4 | 164.1 mm (6.46") | 35.1 mm (1.38") | 174.2 mm (6.86") |
1" PureBond pipe | 23.8 | 339.9 | 155.4 mm (6.12") | 35.1 mm (1.38") | 174.2 mm (6.86") |
Materials of construction | All wetted parts: | PFA, PTFE | |
Exterior actuator parts: | PVDF | ||
Interior actuator parts: | PVDF, Viton®, EPDM and PTFE | ||
Operating conditions | Media pressure at: | ||
21°C (70° F) vacuum | Inlet/outlet | 913 mbar (27" Hg) to 552 kPa (80 psig) | |
100°C (212°F) | Inlet/outlet | 275 kPa (40 psig)* | |
Temperature range: | |||
Ambient | 21°-50°C (70°-122°F) | ||
Fluid | 21°-100°C (70°-212°F) | ||
Environmental compliance: | RoHs, WEEE |
*Actual valve performance varies with pressure and temperature; refer to actual ratings in performance data.
Successfully Opted for software Updates
Integra Animation
-
01-1030870
Safety Lock Out, 3/4", 1", 1 1/4" Integra® Plus WS manual valves
-
WSP-MAN-RKIT
Repair kit for 3/4", 1", or 1 1/4" Integra® Plus WS 2-way, manual multi-turn weir valves
-
WSP-MAN-EC-RKIT
Repair kit for 3/4", 1", or 1 1/4" Integra® Plus WS 2-way, manual multi-turn weir valves with ECTFE actuators
Part Number | Port 1 Connection | Port 2 Connection | Options |
---|---|---|---|
WSP16-2M-16FF | 1" Flaretek® | 1" Flaretek® | PVDF Flaretek® nut |
WSP16-2M-16FF-3 | 1" Flaretek® | 1" Flaretek® | PFA Flaretek® nut |
WSP16-2M-16FF-6 | 1" Flaretek® | 1" Flaretek® | CPFA Flaretek® nut |
WSP16-2M-16FF-EC | 1" Flaretek® | 1" Flaretek® | ECTFE actuator with PFA nut |
WSP16-2M-16FS | 1" Flaretek® | 1" Flaretek® "SpaceSaver" | PVDF Flaretek® nut |
WSP16-2M-16FS-3 | 1" Flaretek® | 1" Flaretek® "SpaceSaver" | PFA Flaretek® nut |
WSP16-2M-16FS-6 | 1" Flaretek® | 1" Flaretek® "SpaceSaver" | CPFA Flaretek® nut |
WSP16-2M-16FS-EC | 1" Flaretek® | 1" Flaretek® "SpaceSaver" | ECTFE actuator with PFA nut |
WSP16-2M-16KK | 1" PrimeLock® | 1" PrimeLock® | N/A |
WSP16-2M-16KK-EC | 1" PrimeLock® | 1" PrimeLock® | ECTFE actuator with PFA nut |
WSP16-2M-16KV | 1" PrimeLock® | 1" PrimeLock® "SpaceSaver" | N/A |
WSP16-2M-16KV-EC | 1" PrimeLock® | 1" PrimeLock® "SpaceSaver" | ECTFE actuator with PFA nut |
WSP16-2M-16PF | 1" PureBond® pipe | 1" Flaretek® | PVDF Flaretek® nut |
WSP16-2M-16PF-3 | 1" PureBond® pipe | 1" Flaretek® | PFA Flaretek® nut |
WSP16-2M-16PF-6 | 1" PureBond® pipe | 1" Flaretek® | CPFA Flaretek® nut |
WSP16-2M-16PF-EC | 1" PureBond® pipe | 1" Flaretek® | ECTFE actuator with PFA nut |
WSP16-2M-16PK | 1" PureBond® pipe | 1" PrimeLock® | N/A |
WSP16-2M-16PK-EC | 1" PureBond® pipe | 1" PrimeLock® | ECTFE actuator with PFA nut |
WSP16-2M-16PP | 1" PureBond® pipe | 1" PureBond® pipe | N/A |
WSP16-2M-16PP-EC | 1" PureBond® pipe | 1" PureBond® pipe | ECTFE actuator |
WSP16-2M-16PS | 1" PureBond® pipe | 1" Flaretek® "SpaceSaver" | PVDF Flaretek® nut |
WSP16-2M-16PS-3 | 1" PureBond® pipe | 1" Flaretek® "SpaceSaver" | PFA Flaretek® nut |
WSP16-2M-16PS-6 | 1" PureBond® pipe | 1" Flaretek® "SpaceSaver" | CPFA Flaretek® nut |
WSP16-2M-16PS-EC | 1" PureBond® pipe | 1" Flaretek® "SpaceSaver" | ECTFE actuator with PFA nut |
WSP16-2M-16PV | 1" PureBond® pipe | 1" PrimeLock® "SpaceSaver" | N/A |
WSP16-2M-16PV-EC | 1" PureBond® pipe | 1" PrimeLock® "SpaceSaver" | ECTFE actuator with PFA nut |
WSP16-2M-16SS | 1" Flaretek® "SpaceSaver" | 1" Flaretek® "SpaceSaver" | PVDF Flaretek® nut |
WSP16-2M-16SS-3 | 1" Flaretek® "SpaceSaver" | 1" Flaretek® "SpaceSaver" | PFA Flaretek® nut |
WSP16-2M-16SS-6 | 1" Flaretek® "SpaceSaver" | 1" Flaretek® "SpaceSaver" | CPFA Flaretek® nut |
WSP16-2M-16SS-EC | 1" Flaretek® "SpaceSaver" | 1" Flaretek® "SpaceSaver" | ECTFE actuator with PFA nut |
WSP16-2M-16VV | 1" PrimeLock® "SpaceSaver" | 1" PrimeLock® "SpaceSaver" | N/A |
WSP16-2M-16VV-EC | 1" PrimeLock® "SpaceSaver" | 1" PrimeLock® "SpaceSaver" | ECTFE actuator with PFA nut |
Note:
- Not all configurations are permitted. Contact Entegris if multiple special order features are required.