Integra® Plus WS Manual Valves, 3/4", 2-way, Multi-turn
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Note:
- Not all configurations are permitted. Contact Entegris if multiple special order features are required.
- Bulk chemical delivery (BCD) lines within semiconductor fabs
- Chemical mechanical planarization (CMP) slurry dispense
- Wet etch and clean (WEC) ultrapure chemical handling
- TFT/LCD corrosive chemical handling
Specifications
Port Connection | Flow factor Cv | Flow factor Kv | Dimensions | ||
A | B | C | |||
3/4" PrimeLock | 13.7 | 195.6 | 156.5 mm (6.16") | 28.4 mm (1.12") | 164.6 mm (6.48") |
3/4" Flaretek | 13.7 | 195.6 | 149.6 mm (5.89") | 28.4 mm (1.12") | 164.6 mm (6.48") |
3/4" PureBond | 13.1 | 187.1 | 155.4 mm (6.12") | 28.4 mm (1.12") | 164.6 mm (6.48") |
Materials of construction | All wetted parts: | PFA, PTFE | |
Exterior actuator parts: | PVDF | ||
Interior actuator parts: | PVDF, Viton®, EPDM and PTFE | ||
Operating conditions | Media pressure at: | ||
21°C (70° F) vacuum | Inlet/outlet | 913 mbar (27" Hg) to 552 kPa (80 psig) | |
100°C (212°F) | Inlet/outlet | 275 kPa (40 psig)* | |
Temperature range: | |||
Ambient | 21°-50°C (70°-122°F) | ||
Fluid | 21°-100°C (70°-212°F) | ||
Environmental compliance: | RoHs, WEEE |
*Actual valve performance varies with pressure and temperature; refer to actual ratings in performance data.
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01-1030870
Safety Lock Out, 3/4", 1", 1 1/4" Integra® Plus WS manual valves
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WSP-MAN-RKIT
Repair kit for 3/4", 1", or 1 1/4" Integra® Plus WS 2-way, manual multi-turn weir valves
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WSP-MAN-EC-RKIT
Repair kit for 3/4", 1", or 1 1/4" Integra® Plus WS 2-way, manual multi-turn weir valves with ECTFE actuators
Part Number | Port 1 Connection | Port 2 Connection | Options |
---|---|---|---|
WSP12-2M-12FF | 3/4" Flaretek® | 3/4" Flaretek® | PVDF Flaretek® nut |
WSP12-2M-12FF-3 | 3/4" Flaretek® | 3/4" Flaretek® | PFA Flaretek® nut |
WSP12-2M-12FF-6 | 3/4" Flaretek® | 3/4" Flaretek® | CPFA Flaretek® nut |
WSP12-2M-12FF-EC | 3/4" Flaretek® | 3/4" Flaretek® | ECTFE actuator with PFA nut |
WSP12-2M-12FS | 3/4" Flaretek® | 3/4" Flaretek® "SpaceSaver" | PVDF Flaretek® nut |
WSP12-2M-12FS-3 | 3/4" Flaretek® | 3/4" Flaretek® "SpaceSaver" | PFA Flaretek® nut |
WSP12-2M-12FS-6 | 3/4" Flaretek® | 3/4" Flaretek® "SpaceSaver" | CPFA Flaretek® nut |
WSP12-2M-12FS-EC | 3/4" Flaretek® | 3/4" Flaretek® "SpaceSaver" | ECTFE actuator with PFA nut |
WSP12-2M-12KK | 3/4" PrimeLock® | 3/4" PrimeLock® | N/A |
WSP12-2M-12KK-EC | 3/4" PrimeLock® | 3/4" PrimeLock® | ECTFE actuator with PFA nut |
WSP12-2M-12KV | 3/4" PrimeLock® | 3/4" PrimeLock® "SpaceSaver" | N/A |
WSP12-2M-12KV-EC | 3/4" PrimeLock® | 3/4" PrimeLock® "SpaceSaver" | ECTFE actuator with PFA nut |
WSP12-2M-12PF | 3/4" PureBond® pipe | 3/4" Flaretek® | PVDF Flaretek® nut |
WSP12-2M-12PF-3 | 3/4" PureBond® pipe | 3/4" Flaretek® | PFA Flaretek® nut |
WSP12-2M-12PF-6 | 3/4" PureBond® pipe | 3/4" Flaretek® | CPFA Flaretek® nut |
WSP12-2M-12PF-EC | 3/4" PureBond® pipe | 3/4" Flaretek® | ECTFE actuator with PFA nut |
WSP12-2M-12PK | 3/4" PureBond® pipe | 3/4" PrimeLock® | N/A |
WSP12-2M-12PK-EC | 3/4" PureBond® pipe | 3/4" PrimeLock® | ECTFE actuator with PFA nut |
WSP12-2M-12PP | 3/4" PureBond® pipe | 3/4" PureBond® pipe | N/A |
WSP12-2M-12PP-EC | 3/4" PureBond® pipe | 3/4" PureBond® pipe | ECTFE actuator |
WSP12-2M-12PS | 3/4" PureBond® pipe | 3/4" Flaretek® "SpaceSaver" | PVDF Flaretek® nut |
WSP12-2M-12PS-3 | 3/4" PureBond® pipe | 3/4" Flaretek® "SpaceSaver" | PFA Flaretek® nut |
WSP12-2M-12PS-6 | 3/4" PureBond® pipe | 3/4" Flaretek® "SpaceSaver" | CPFA Flaretek® nut |
WSP12-2M-12PS-EC | 3/4" PureBond® pipe | 3/4" Flaretek® "SpaceSaver" | ECTFE actuator with PFA nut |
WSP12-2M-12PV | 3/4" PureBond® pipe | 3/4" PrimeLock® "SpaceSaver" | N/A |
WSP12-2M-12PV-EC | 3/4" PureBond® pipe | 3/4" PrimeLock® "SpaceSaver" | ECTFE actuator with PFA nut |
WSP12-2M-12SS | 3/4" Flaretek® "SpaceSaver" | 3/4" Flaretek® "SpaceSaver" | PVDF Flaretek® nut |
WSP12-2M-12SS-3 | 3/4" Flaretek® "SpaceSaver" | 3/4" Flaretek® "SpaceSaver" | PFA Flaretek® nut |
WSP12-2M-12SS-6 | 3/4" Flaretek® "SpaceSaver" | 3/4" Flaretek® "SpaceSaver" | CPFA Flaretek® nut |
WSP12-2M-12SS-EC | 3/4" Flaretek® "SpaceSaver" | 3/4" Flaretek® "SpaceSaver" | ECTFE actuator with PFA nut |
WSP12-2M-12VV | 3/4" PrimeLock "SpaceSaver" | 3/4" PrimeLock® "SpaceSaver" | N/A |
WSP12-2M-12VV-EC | 3/4" PrimeLock "SpaceSaver" | 3/4" PrimeLock® "SpaceSaver" | ECTFE actuator with PFA nut |
Note:
- Not all configurations are permitted. Contact Entegris if multiple special order features are required.