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Integra® Pneumatic Valves, 1/2" Orifice, 3-way

This high purity diversion valve minimizes footprint and is ideal in high purity chemical applications including CMP slurry.

  • All wetted parts are PFA providing chemical resistance in high purity, corrosive chemical applications
  • PVDF actuator components and no external metal parts means lower contamination potential in the event of a media leak or exposure to harsh external environments
  • No metals or elastomers in secondary containment area improves reliability and cleanliness
  • Available with Flaretek®, Flaretek "SpaceSaver" PureBond® or FNPT connections
  • "SpaceSaver" fittings mean fewer connections, faster installation and reduced labor and costs
  • FlareLock® II connections are available for a stronger, safer tube connection in high temperature and high pressure applications
  • Stand-alone mounting base enables easy valve insallation and removal without tools
  • Optional remote electronic position indication is available to monitor valve open and closed positions
  • Optional ECTFE material is available for external, nonwetted components providing higher chemical resistance to oxygenated solvents and bases
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